A flexible Ag/AgCl micro reference electrode based on a parylene tube structure.

A flexible Ag/AgCl micro reference electrode based on a parylene tube structure.
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DOI:
10.1016/j.snb.2017.02.135
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发表时间:
2017-08
期刊:
Sensors and actuators. B, Chemical
影响因子:
--
通讯作者:
Xu Y
Xu Y
中科院分区:
其他
文献类型:
--
作者:
Zhao Z;Tu H;Kim EG;Sloane BF;Xu Y

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在开发微型电化学传感器的努力中,参比电极的小型化一直是一个具有挑战性的任务。本文报道了一种具有内电解质贮液器的柔性微参比电极。这种新器件基于一种独特的微加工聚对二甲苯管结构,该结构填充有富含Cl−的电解质,其中插入了一根直径为50 μm的银(Ag)线,覆盖有7.4 μm厚的银(AgCl)层。试管远端填充氯化钾(KCl)饱和琼脂糖凝胶。由于采用了银线、厚AgCl层和内部电解液池,工作时间长,基准电压稳定。已经发现在10小时期间的漂移小于2 mV。该装置的总运行时间已超过100小时。此外,与微加工的兼容性允许集成其他组件,从而实现真正小型化的电化学传感器或传感系统。为了证明这一点,我们展示了一个pH值传感器,通过结合参比电极和氧化铱电极单片集成在聚对二甲苯管的表面上。
In the effort of developing micro-electrochemical sensors, the miniaturization of reference electrodes has been a challenging task. In this paper, a flexible micro reference electrode with an internal electrolyte reservoir is reported. This new device is based on a unique microfabricated parylene tube structure, which is filled with Cl− rich electrolyte, into which a 50 μm diameter silver (Ag) wire covered with a 7.4 μm thick silver chloride (AgCl) layer is inserted. The distal end of the tube is filled with potassium chloride (KCl) saturated agarose gel. The Ag wire, thick AgCl layer, and internal electrolyte reservoir lead to a long operation time and a stable reference voltage. The drift over a 10-hour period has been found to be less than 2 mV. The total operation time of the device has exceeded 100 hours. Furthermore, the compatibility with microfabrication allows the integration of other components, leading to truly miniaturized electrochemical sensors or sensing systems. To prove this, we demonstrated a pH sensor by combining the reference electrode and an iridium oxide electrode monolithically integrated on the surface of the parylene tube.
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