Fabrication of a Metal Micro Mold by Using Pulse Micro Electroforming.
Fabrication of a Metal Micro Mold by Using Pulse Micro Electroforming.
复制标题
脉冲微电铸金属微模具的制作
DOI：
10.3390/mi9050203
复制
发表时间：
2018-04-27
期刊：
影响因子：
3.4
通讯作者：
Guo Z
中科院分区：
文献类型：
--
作者：
Chen X;Liu L;He J;Zuo F;Guo Z
微流体装置已广泛用于生物医学和生物化学应用。聚甲基丙烯酸甲酯（PMMA）因其独特的性能在微流控器件的制作中显示出巨大的潜力。热压成型技术已成为制备聚合物微流控器件的一种流行方法。然而，在热压中使用的模具的制造通常是耗时的，并且对于经济有效的原型制作来说通常是不切实际的。提出了一种直接在金属基体上脉冲微电铸制备金属微模具的改进工艺，该工艺可节省时间，降低成本。在该方法中，使用添加剂来避免沉积镍的表面缺陷。为了提高电铸结构与基体的结合强度，在电铸前对金属基体进行了化学腐蚀处理。最后，以获得高表面质量（低表面粗糙度）的金属微模具为目标，设计并进行了正交实验，以优化电铸工艺参数。利用优化后的工艺参数，成功制备出不同结构的金属微模具。
Microfluidic devices have been widely used for biomedical and biochemical applications. Due to its unique characteristics, polymethyl methacrylate (PMMA) show great potential in fabricating microfluidic devices. Hot embossing technology has established itself as a popular method of preparing polymer microfluidic devices in both academia and industry. However, the fabrication of the mold used in hot embossing is time-consuming in general and often impractical for economically efficient prototyping. This paper proposes a modified technology for preparing metal micro molds by using pulse micro electroforming directly on metallic substrate, which could save time and reduce costs. In this method, an additive was used to avoid surface defect on deposited nickel. A chemical etching process was performed on the metallic substrate before the electroforming process in order to improve the bonding strength between the deposited structure and substrate. Finally, with the aim of obtaining a metal micro mold with high surface quality (low surface roughness), an orthogonal experiment was designed and conducted to optimize the electroforming parameters. Additionally, metal micro molds with different structures were well prepared by using the optimized parameters.
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