A Low Reverse Recovery Charge Superjunction MOSFET With an Integrated Tunneling Diode

A Low Reverse Recovery Charge Superjunction MOSFET With an Integrated Tunneling Diode
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具有集成隧道二极管的低反向恢复电荷超级结 MOSFET

DOI:
10.1109/ted.2019.2936584
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发表时间:
2019-09
影响因子:
3.1
通讯作者:
Tang Fang
Tang Fang
中科院分区:
工程技术2区
文献类型:
--
作者:
Li Ping;Guo Jingwei;Hu Shengdong;Lin Zhi;Tang Fang

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提出了一种集成隧道二极管的超结MOSFET,并进行了模拟研究。在P-基极区的表面上包括N+区和P+区的隧穿二极管与由氧化物层隔离的P+/P-柱/N+(子)二极管串联连接。防止电子从N柱区和N+(子)区注入到P柱区中,这导致所提出的器件中的低反向恢复电荷。结果表明,在300和400 K时,与传统的反向恢复电荷相比,反向恢复电荷分别减少了72.2%和74.1%。
A superjunction MOSFET with an integrated tunneling diode is proposed and investigated by simulations in this article. The tunneling diode comprised the N+ region and the P+ region on the surface of the P-base region is connected in series with the P+/P-pillar/N+ (sub) diode isolated by an oxide layer. The electrons are prevented from injecting into the P-pillar region from both the N-pillar region and the N+ (sub) region, which leads to a low reverse recovery charge in the proposed device. As a result, up to 72.2% and 74.1% reduction in the reverse recovery charge could be achieved when compared with the conventional one at 300 and 400 K, respectively.
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