Multi-objective optimal design of high frequency probe for scanning ion conductance microscopy
Multi-objective optimal design of high frequency probe for scanning ion conductance microscopy
复制标题
扫描离子电导显微镜高频探针多目标优化设计
DOI：
10.3901/cjme.2015.0907.109
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发表时间：
2016
影响因子：
4.2
通讯作者：
Yu Dehong
中科院分区：
文献类型：
--
作者：
Guo Renfei;Zhuang Jian;Ma Li;Li Fei;Yu Dehong
扫描离子电导显微镜（SICM）是一种新兴的具有纳米级分辨率的非破坏性表面形貌表征仪器。然而，现有的基于调制电流的SICM系统中的探头调节频率较低，增加了系统噪声，并且难以对具有陡峭高度变化的样品表面进行成像。为了使SICM具有对具有陡峭高度变化的表面进行成像的能力，设计了一种可用于基于调制电流的跳变模式的新型探头。该设计依靠两个不同行程的压电陶瓷来分离Z方向上的位置调节和探头频率调节。为了进一步提高探头的谐振频率，基于多目标优化方法和有限元分析，对探头各部件的材料和关键尺寸进行了优化。最佳设计具有高于10 kHz的谐振频率。为了验证所设计探头的合理性，利用自制的基于调制电流的SICM系统对微结构光栅样品进行了成像。实验结果表明，所设计的高频探头可以有效地降低尖峰噪声，平均尖峰噪声数降低了26%。该设计为提高现有SICM系统的成像质量提供了一种可行的解决方案，这些系统通常使用调节频率相对较低的普通探头。
Scanning ion conductance microscopy(SICM) is an emerging non-destructive surface topography characterization apparatus with nanoscale resolution. However, the low regulating frequency of probe in most existing modulated current based SICM systems increases the system noise, and has difficulty in imaging sample surface with steep height changes. In order to enable SICM to have the capability of imaging surfaces with steep height changes, a novel probe that can be used in the modulated current based hopping mode is designed. The design relies on two piezoelectric ceramics with different travels to separate position adjustment and probe frequency regulation in the Z direction. To further improve the resonant frequency of the probe, the material and the key dimensions for each component of the probe are optimized based on the multi-objective optimization method and the finite element analysis. The optimal design has a resonant frequency of above 10 kHz. To validate the rationality of the designed probe, microstructured grating samples are imaged using the homebuilt modulated current based SICM system. The experimental results indicate that the designed high frequency probe can effectively reduce the spike noise by 26% in the average number of spike noise. The proposed design provides a feasible solution for improving the imaging quality of the existing SICM systems which normally use ordinary probes with relatively low regulating frequency.
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影响因子：
15
作者：
Kim McKelvey;S. Kinnear;David Perry;Dmitry Momotenko;P. Unwin
通讯作者：
Kim McKelvey;S. Kinnear;David Perry;Dmitry Momotenko;P. Unwin
DOI：
10.3390/s121114983
发表时间：
2012-11-06
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Happel P;Thatenhorst D;Dietzel ID
通讯作者：
Dietzel ID
影响因子：
48
作者：
Novak, Pavel;Li, Chao;Shevchuk, Andrew I.;Stepanyan, Ruben;Caldwell, Matthew;Hughes, Simon;Smart, Trevor G.;Gorelik, Julia;Ostanin, Victor P.;Lab, Max J.;Moss, Guy W. J.;Frolenkov, Gregory I.;Klenerman, David;Korchev, Yuri E.
通讯作者：
Korchev, Yuri E.
影响因子：
17.1
作者：
Chen CC;Zhou Y;Baker LA
通讯作者：
Baker LA
DOI：
10.1016/j.pnsc.2008.01.011
发表时间：
2008-06-10
影响因子：
4.7
作者：
Li, Chao;Johnson, Nicholas;Klenerman, David
通讯作者：
Klenerman, David