Planar mid-infrared InAsSb photodetector grown on GaAs substrates by MOCVD

Planar mid-infrared InAsSb photodetector grown on GaAs substrates by MOCVD
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通过 MOCVD 在 GaAs 衬底上生长的平面中红外 InAsSb 光电探测器

DOI:
10.7567/1882-0786/ab507c
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发表时间:
2019-10
影响因子:
2.3
通讯作者:
Dong Bohua
Dong Bohua
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Wang Tingting;Xiong Min;Zhao Yingchun;Dong Xu;Zhao Yu;Miao Jingjun;Huang Yong;Zhang Baoshun;Cao Lixin;Dong Bohua

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报道了用InAsSb作为吸收材料生长在GaAs衬底上的平面型中波长红外探测器。在多片MOCVD反应器中进行了外延层生长和锌在InAsSb中的扩散。除了由锌扩散定义的平面p+n结外,还集成了肖特基结来降低暗电流和提高光学响应度。在85K时,器件的截止波长大于5μm,零偏置条件下的比探测率D*为5.0×10 11 cm·Hz1/2W−1,频率为4.1μm。该探测器的工作温度可达160K,D*为1.0×109 cm·Hz1/2W−1。
Planar mid-wavelength infrared photodetectors with InAsSb absorber grown on GaAs substrates are demonstrated. Epilayer growth and diffusion of zinc in InAsSb were carried out in a multi-wafer MOCVD reactor. In addition to the planar p+n junction defined by Zn diffusion, a Schottky junction was integrated to reduce the dark current and improve the optical responsivity. At 85 K, a cutoff wavelength greater than 5 μm was achieved and specific detectivity D* was estimated to be 5.0 × 1011 cm·Hz1/2 W−1 at 4.1 μm under zero bias condition. Furthermore, the photodetector can operate up to 160 K with a D* of 1.0 × 109 cm·Hz1/2 W−1.
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