Trapped-Energy Thickness-Extensional Mode of a Partially Electroded ZnO Thin-Film Resonator
Trapped-Energy Thickness-Extensional Mode of a Partially Electroded ZnO Thin-Film Resonator
复制标题
部分电极 ZnO 薄膜谐振器的俘获能量厚度扩展模式
DOI：
10.1109/tuffc.2018.2845386
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发表时间：
2018-06
期刊：
影响因子：
--
通讯作者：
Yang Jiashi
中科院分区：
文献类型：
--
作者：
Zhao Zinan;Wang Bin;Qian Zhenghua;Yang Jiashi
基于无界全电极和非电极薄膜的色散曲线，对ZnO薄膜谐振器的自由振动和受迫振动进行了分析。自由振动问题的厚度解分别由电极区域和非电极区域的频散曲线的模式分支组成。在非电极区域中将能量从振动区域带走的模式分支被忽略，因为该有效能量损失对应于频谱中的复频率。由于每个区域的厚度解都精确地满足微分方程和主表面上的边界条件，将厚度解代入Tiersten导出的修正的汉密尔顿变分原理，得到了在电极区和非电极区交界处谐振腔厚度上积分形式的近似连续性条件。积分连续性条件的驻定条件导致齐次线性方程组，该方程组确定了从完全电极膜的第一TE截止频率到发生传统捕获能量振动的无电极膜的第一TE截止频率范围内的频谱。通过对ZnO薄膜的上下电极施加电压，对薄膜的TE模进行了强迫振动分析，进一步验证了自由振动分析结果的正确性。
Free and forced vibration analysis of ZnO thin-film resonator operating with trapped-energy thickness-extensional (TE) mode is performed based on the dispersion curves for both the unbounded fully electroded and unelectroded films. The thickness solutions to the free vibration problem consist of the mode branches of the dispersion curves for the electroded and the unelectroded regions, respectively. The mode branches in the unelectroded region that carry energy away from the vibration zone are neglected because this effective energy loss corresponds to a complex frequency in the frequency spectrum. Since the thickness solutions in each region have satisfied the differential equations and the boundary conditions on the major surfaces exactly, the substitution of the thickness solutions into the modified Hamilton variational principle derived by Tiersten gives an approximate continuity condition in the form of integral over the thickness of the resonator at the interface between the electroded and unelectroded regions. The stationary condition of the integral continuity condition leads to a system of homogeneous linear equations, which determines the frequency spectrum ranging from the first TE cutoff frequency of the fully electroded film to that of the unelectroded film where the conventional trapped-energy vibration occurs. Forced vibration analysis of ZnO thin film driven into TE mode by applying a voltage to the top and bottom electrodes is also performed, which further verifies the validity of the obtained results from the free vibration analysis.
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DOI：
10.1109/tuffc.2005.1428043
发表时间：
2003-10
期刊：
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
影响因子：
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作者：
K. Nakamura;S. Sato;S. Ohta;K. Yamada;A. Doi
通讯作者：
K. Nakamura;S. Sato;S. Ohta;K. Yamada;A. Doi
DOI：
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发表时间：
1978
期刊：
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影响因子：
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作者：
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通讯作者：
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影响因子：
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作者：
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通讯作者：
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影响因子：
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作者：
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通讯作者：
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DOI：
10.1109/freq.2003.1275190
发表时间：
2005-09
期刊：
IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003
影响因子：
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作者：
K. Lakin
通讯作者：
K. Lakin