An integrated planar magnetic micropump.
An integrated planar magnetic micropump.
复制标题
一个集成的平面磁微孔。
DOI：
10.1016/j.mee.2013.11.014
复制
发表时间：
2014-04-01
影响因子：
2.3
通讯作者：
Lin Q
中科院分区：
文献类型：
--
作者：
Ni J;Wang B;Chang S;Lin Q
本文介绍了一种集成磁微泵，它采用基于平面顺应性的止回阀和磁致动膜。该装置允许简单的制造和与其他功能元件的系统集成，由两个功能层组成，均由聚二甲基硅氧烷（PDMS）制成。上面的PDMS层提供具有电镀薄膜坡莫合金带的柔性膜，用于驱动，而下面的PDMS层包含微流体组件，包括微通道，泵室和一对用于流量调节的止回阀。PDMS止回阀分别位于泵腔的入口和出口，每个止回阀都有一个与刚性止回阀接触的柔性阀瓣，以实现流体的单向流动，最大限度地减少泄漏。因此，可以很容易地根据泵送动作产生受控容积率的单向流动。通过研究微泵泵送流量与磁致动驱动频率和背压的关系，对微泵进行了系统表征。实验结果表明，该微泵在2 Hz频率下能够产生0.15 μL/min的流体流量，相当于每冲程1 nL的体积分辨率，并且在最大背压为550 Pa的情况下可靠地工作，证明了该微泵在各种集成芯片实验室系统中的潜在应用。
This paper presents an integrated magnetic micropump that uses in-plane compliance-based check valves and a magnetically actuated membrane. The device, which allows for simple fabrication and system integration with other functional elements, consists of two functional layers both fabricated from poly(dimethylsiloxane) (PDMS). The upper PDMS layer provides a compliant membrane with an electroplated thin-film permalloy strip for actuation, while the lower PDMS layer incorporates microfluidic components including the microchannels, pump chamber, and a pair of check valves for flow regulation. The PDMS check valves, each having a compliant flap in contact with a stiff stopper to allow for unidirectional fluid flow with minimized leakage, are located at the inlet and outlet of the pump chamber, respectively. As such, the unidirectional flow at a controlled volumetric rate can be readily generated in accordance with the pumping actions. Systematic characterization of the micropump has been performed by studying the dependence of its pumping flow rate on the driving frequency of magnetic actuation, and the back pressure. Experimental results show that this micropump is capable of generating fluid flow of 0.15 μL/min at the frequency of 2 Hz, corresponding to a volume resolution of 1 nL per stroke, and working reliably against a maximum back-pressure of 550 Pa, demonstrating the potential application of this micropump for various integrated lab-on-a-chip systems.
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DOI：
10.1109/jmems.2011.2174423
发表时间：
2012-02
期刊：
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
影响因子：
--
作者：
Wang B;Ni J;Litvin Y;Pfaff DW;Lin Q
通讯作者：
Lin Q
DOI：
10.1088/0960-1317/20/9/095033
发表时间：
2010
期刊：
Journal of micromechanics and microengineering : structures, devices, and systems
影响因子：
--
作者：
Ni J;Huang F;Wang B;Li B;Lin Q
通讯作者：
Lin Q
影响因子：
2.7
作者：
Jo, BH;Van Lerberghe, LM;Beebe, DJ
通讯作者：
Beebe, DJ
影响因子：
6.1
作者：
Xie, J;Shih, J;Tai, YC
通讯作者：
Tai, YC
影响因子：
6.1
作者：
Kim, JeongYun;Baek, JuYeoul;Lee, SangHoon
通讯作者：
Lee, SangHoon