Vibration Identification of Folded-MEMS Comb Drive Resonators.
Vibration Identification of Folded-MEMS Comb Drive Resonators.
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折叠 MEMS 梳状驱动谐振器的振动识别
DOI：
10.3390/mi9080381
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发表时间：
2018-08-01
期刊：
影响因子：
3.4
通讯作者：
Ma W
中科院分区：
文献类型：
--
作者：
Han J;Li L;Jin G;Feng J;Li B;Jia H;Ma W
固有频率和频率响应是衡量谐振式微机电系统（MEMS）器件性能的两个重要指标。本文对一种折叠式MEMS梳状驱动谐振器的主共振进行了振动识别的理论分析和数值计算。首先介绍了考虑结构和静电非线性的运动控制方程。为了克服文献中频率假设的不足，将多尺度法和同伦概念相结合，对理论求解过程进行了改进，得到了考虑直流电压引起频率偏移的主共振解。通过有限差分法和四阶Runge-Kutta模拟的理论预测和数值结果，我们发现，当交流激励足够小时，主频率响应实际上包括低能量和高能量分支。当交流励磁增加到一定值时，两个分支彼此相交。然后，基于频率响应分支、硬化和软化弯曲的变化特性以及动力吸合失稳的理想估计，得到了描述极端振动幅值随直流电压变化的分区图，将动力响应划分为5个区域。理论预测和仿真结果之间的良好协议说明了分析的有效性。
Natural frequency and frequency response are two important indicators for the performances of resonant microelectromechanical systems (MEMS) devices. This paper analytically and numerically investigates the vibration identification of the primary resonance of one type of folded-MEMS comb drive resonator. The governing equation of motion, considering structure and electrostatic nonlinearities, is firstly introduced. To overcome the shortcoming of frequency assumption in the literature, an improved theoretical solution procedure combined with the method of multiple scales and the homotopy concept is applied for primary resonance solutions in which frequency shift due to DC voltage is thoroughly considered. Through theoretical predictions and numerical results via the finite difference method and fourth-order Runge-Kutta simulation, we find that the primary frequency response actually includes low and high-energy branches when AC excitation is small enough. As AC excitation increases to a certain value, both branches intersect with each other. Then, based on the variation properties of frequency response branches, hardening and softening bending, and the ideal estimation of dynamic pull-in instability, a zoning diagram depicting extreme vibration amplitude versus DC voltage is then obtained that separates the dynamic response into five regions. Excellent agreements between the theoretical predictions and simulation results illustrate the effectiveness of the analyses.
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