The Influence of Intrinsic Water and Ion Permeation on the Dielectric Properties of Parylene C Films

The Influence of Intrinsic Water and Ion Permeation on the Dielectric Properties of Parylene C Films
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固有水和离子渗透对Parylene C薄膜介电性能的影响

DOI:
10.1109/jerm.2023.3285049
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发表时间:
2023
期刊:
RF and Microwaves in Medicine and Biology
影响因子:
--
通讯作者:
Stelson, Angela C.
Stelson, Angela C.
中科院分区:
--
文献类型:
--
作者:
Pawlik, Jacob T.;Barrera, Nikolas D.;Yoon, Eugene J.;Booth, James C.;Long, Christian J.;Orloff, Nathan D.;Meng, Ellis;Stelson, Angela C.

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聚对二甲苯C是一种广泛应用于植入式医疗设备的介电阻挡层,因为它能很好地与表面保持一致,并对生物环境绝缘。然而,多项研究表明,水分可以通过缺陷和本征扩散渗透到对二甲苯C薄膜中,导致分层和器件失效。虽然许多研究已经在体外测试了器件的完整性,但很少有研究分离出特定的降解机制对器件故障的影响。在这里,我们使用一种名为微波微流控光谱(MMS)的宽带阻抗技术来测量无缺陷且与基材具有最佳附着力的对二甲苯C薄膜目标区域的流体渗透率。我们发现在20℃或37℃的水或磷酸盐缓冲盐水中浸泡两个月后,对位碳涂层共面波导的宽带S参数在100 MHz-110 GHz范围内没有变化。此外,由于流体浸泡,没有出现分层现象。我们的研究有助于澄清关于水和离子扩散对对二甲苯C器件寿命的影响的争论,并为更好地制备可植入器件的对二甲苯C涂层提供参考。
Parylene C is a widely used dielectric barrier in implantable medical devices because it conforms well to surfaces and insulates against biological environments. However, multiple studies have shown that moisture can intrude into Parylene C films through defects and intrinsic diffusion, leading to delamination and device failure. While many studies have tested device integrity in vitro, few have isolated the influence of specific degradation mechanisms on device failure. Here, we use a broadband impedance technique called Microwave Microfluidic Spectroscopy (MMS) to measure fluid permeation in targeted regions of Parylene C films that are free of defects and have optimal adhesion to the substrate. We found no changes in the broadband S-parameters from 100 MHz–110 GHz for Parylene C coated coplanar waveguides soaked in water or phosphate buffered saline at 20 °C or 37 °C for two months. Furthermore, there was no delamination induced by fluid soaking. Our study helps to clear debate about the influence of water and ion diffusion on Parylene C device lifetime and inform better fabrication of Parylene C coatings for implantable devices.
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