Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity.
Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity.
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DOI：
10.3390/mi8080240
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发表时间：
2017-08-04
期刊：
影响因子：
3.4
通讯作者：
Hane K
中科院分区：
文献类型：
--
作者：
Izawa T;Sasaki T;Hane K
工作在机械谐振频率下的扫描微镜，其扭杆弹簧存在非线性。扭杆弹簧随着旋转角度的增加而变得比线性弹簧更硬（硬弹簧效应）。扭杆弹簧的硬弹簧效应产生了几个问题，如滞后、频率偏移和振荡跳变引起的不稳定性。本文研究了一种带有静电梳齿弹簧的扫描微镜，用以补偿扭杆弹簧的硬弹簧效应。扭杆弹簧的硬弹簧效应由静电梳齿弹簧的等效软弹簧效应补偿。虽然谐振频率增加，但是振荡曲线在谐振频率处变得对称。文中给出了理论分析，对补偿的原理作了粗略的解释。一种具有两种梳齿的0.5mm正方形扫描微镜，致动器梳和补偿梳由绝缘体上硅晶片制造，用于在真空和大气中测试硬弹簧的补偿。通过在真空和大气中对静电梳齿弹簧施加直流电压来补偿振荡曲线的弯曲。从理论上分析了这种补偿作用是由于静电梳齿弹簧的软弹簧效应。
A scanning micro-mirror operated at the mechanical resonant frequency often suffer nonlinearity of the torsion-bar spring. The torsion-bar spring becomes harder than the linear spring with the increase of the rotation angle (hard-spring effect). The hard-spring effect of the torsion-bar spring generates several problems, such as hysteresis, frequency shift, and instability by oscillation jump. In this paper, a scanning micro-mirror with an electrostatic-comb spring is studied for compensation of the hard-spring effect of the torsion-bar spring. The hard-spring effect of the torsion-bar spring is compensated with the equivalent soft-spring effect of the electrostatic-comb spring. The oscillation curve becomes symmetric at the resonant frequency although the resonant frequency increases. Theoretical analysis is given for roughly explaining the compensation. A 0.5 mm square scanning micro-mirror having two kinds of combs, i.e., an actuator comb and a compensation comb, is fabricated from a silicon-on-insulator wafer for testing the compensation of the hard-spring in a vacuum and in atmospheric air. The bending of the oscillation curve is compensated by applying a DC voltage to the electrostatic-comb spring in vacuum and atmosphere. The compensation is attributed by theoretical approach to the soft-spring effect of the electrostatic-comb spring.
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