Fabrication of Thermal Conductivity Detector Based on MEMS for Monitoring Dissolved Gases in Power Transformer
Fabrication of Thermal Conductivity Detector Based on MEMS for Monitoring Dissolved Gases in Power Transformer
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基于MEMS的热导检测器的制作用于监测电力变压器中的溶解气体
DOI：
10.3390/s20010106
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发表时间：
2019-12
期刊：
影响因子：
3.9
通讯作者：
Xiaofeng Zhu
中科院分区：
文献类型：
--
作者：
Tingliang Tan;Jianhai Sun;Tingting Chen;Xinxiao Zhang;Xiaofeng Zhu
In this work, a high sensitivity micro-thermal conductivity detector (μTCD) with four thermal conductivity cells was proposed. Compared with conventional TCD sensors, the thermal conductivity cell in this work was designed as a streamlined structure; the thermistors were supported by a strong cantilever beam and suspended in the center of the thermal conductivity cell, which was able to greatly reduce the dead volume of the thermal conductivity cell and the heat loss of the substrate, improving the detection sensitivity. The experimental results demonstrated that the μTCD shows good stability and high sensitivity, which could rapidly detect light gases with a detection limit of 10 ppm and a quantitative repeatability of less than 1.1%.
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DOI：
10.1016/j.chroma.2013.03.022
发表时间：
2013-05
期刊：
Journal of chromatography. A
影响因子：
--
作者：
Jianhai Sun;D. Cui;Xing Chen;Lulu Zhang;H. Cai;Hui Li
通讯作者：
Jianhai Sun;D. Cui;Xing Chen;Lulu Zhang;H. Cai;Hui Li
DOI：
10.1109/memsys.2009.4805369
发表时间：
2009-03
期刊：
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
影响因子：
--
作者：
B. Kaanta;H. Chen;G. Lambertus;W. Steinecker;O. Zhdaneev;X. Zhang
通讯作者：
B. Kaanta;H. Chen;G. Lambertus;W. Steinecker;O. Zhdaneev;X. Zhang
DOI：
--
发表时间：
2010
期刊：
--
影响因子：
--
作者：
B. Kaanta;Hua Chen;Xin Zhang
通讯作者：
B. Kaanta;Hua Chen;Xin Zhang
DOI：
10.1109/transducers.2017.7994328
发表时间：
2017-06
期刊：
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
影响因子：
--
作者：
Fei Feng;Bowen Tian;Lei Hou;Zhengyin Yu;Haimei Zhou;X. Ge;Xinxin Li
通讯作者：
Fei Feng;Bowen Tian;Lei Hou;Zhengyin Yu;Haimei Zhou;X. Ge;Xinxin Li
DOI：
10.1109/imtc.1995.515123
发表时间：
1995-04
期刊：
Proceedings of 1995 IEEE Instrumentation and Measurement Technology Conference - IMTC '95
影响因子：
--
作者：
Jin-Biao Huang;Chih-Ming Ho;S. Tung;Chang Liu;Y. Tai
通讯作者：
Jin-Biao Huang;Chih-Ming Ho;S. Tung;Chang Liu;Y. Tai