On bandwidth characteristics of tuning fork micro-gyroscope with mechanically coupled sense mode.

On bandwidth characteristics of tuning fork micro-gyroscope with mechanically coupled sense mode.
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机械耦合传感模式音叉微陀螺仪带宽特性研究

DOI:
10.3390/s140713024
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发表时间:
2014-07-21
期刊:
Sensors (Basel, Switzerland)
影响因子:
--
通讯作者:
Wang H
Wang H
中科院分区:
其他
文献类型:
--
作者:
Ni Y;Li H;Huang L;Ding X;Wang H

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研究了机械耦合敏感模态音叉微陀螺的带宽特性,为机械带宽设计提供参考。首先介绍了感测模式机械耦合的概念。然后对陀螺仪的机械部分进行了理论频率响应分析。在全频范围内推导了微分输出信号与输入角速率频率之间的关系式,并在低频范围内进行了简化。基于这些方程,讨论了理想和非理想条件下的带宽特性。分析结果表明,在理想条件下,音叉微陀螺仪的带宽特性与单质量块微陀螺仪的带宽特性相似,但在非理想条件下,特别是当传感质量和/或刚度不对称时,由于同相模式将参与反相振动响应,带宽特性会有很大差异。在自行设计的两个微陀螺样机上进行了实验验证。推导的方程和分析结果可用于指导机械耦合敏感音叉微陀螺的机械带宽设计。
The bandwidth characteristics of a tuning fork micro-gyroscope with mechanically coupled sense mode were investigated in this paper to provide some references for mechanical bandwidth design. The concept of sense mode mechanical coupling is introduced first. Theoretical frequency response analyses were then carried out on the mechanical part of the gyroscope. Equations representing the relationships between the differential output signal and the frequency of the input angular rate were deduced in full frequency range and further simplified in low frequency range. Based on these equations, bandwidth characteristics under ideal and non-ideal conditions are discussed. Analytical results show that under ideal conditions, the bandwidth characteristics of a tuning fork micro-gyroscope are similar to those of a single mass micro-gyroscope, but under non-ideal conditions, especially when sense mass and/or stiffness are asymmetric, the bandwidth characteristics would be quite different because the in-phase mode would participate in the anti-phase vibration response. Experimental verifications were carried out on two micro-gyroscope prototypes designed in our laboratory. The deduced equations and analytical results can be used in guiding the mechanical bandwidth design of tuning fork micro-gyroscopes with mechanically coupled sense mode.
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