The application of double-layer silicon nitride films on the solar cell anti-reflection coatings
The application of double-layer silicon nitride films on the solar cell anti-reflection coatings
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双层氮化硅薄膜在太阳能电池增透膜上的应用
DOI：
10.1504/ijnm.2013.056046
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发表时间：
2013-09
影响因子：
--
通讯作者：
Zhang, M.S.
中科院分区：
文献类型：
--
作者：
Ma, X.J.;Lin, T.;Chen, Q.B.;Zhang, M.S.
本文研究了单层氮化硅（SiNx）增透涂层单晶硅太阳能电池的反射特性、外量子效率和能量转换效率。PC1D软件模拟结果表明，底层SiNx层厚度为35 nm，折射率为2.3，上层SiNx层厚度为40 nm，折射率为1.9的组合反射率最小。通过调整PECVD生长中SiH4:NH3的比例，制备了双层SiNx增透膜。测量结果表明，在短波长范围内，双层涂层的反射率比单层涂层小，而在380 ~ 400 nm范围内，两层涂层的强吸收变化不明显。虽然组合参数不理想，但与单层增透膜相比，双层SiNx增透膜太阳能电池的能量转换效率从17.88%提高到18.03%。
In this paper, reflectance features, external quantum efficiency, and energy conversion efficiency of mono-crystalline silicon solar cells with double-layer silicon nitride (SiNx) anti-reflection coatings were investigated. The simulated results by the PC1D software showed that the combination in which the bottom SiNx layer had a thickness of 35 nm and refractive index of 2.3, the upper layer had a thickness of 40 nm and refractive index of 1.9 achieved a minimum reflectance. Double-layer SiNx anti-reflection coatings were fabricated by adjusting the ratio of SiH4:NH3 in the PECVD growth. The measurement showed that the double-layer coatings had less reflectance than the single-layer coatings in short wavelength, while they did not show obvious changes in the range of 380 nm to 400 nm for the intensive absorption. Although the combination parameters were not optimum, the energy conversion efficiency of the double-layer SiNx anti-reflection coatings solar cell was improved from 17.88% to 18.03% comparing with the single-layer coatings.
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影响因子：
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作者：
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通讯作者：
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DOI：
10.1109/pvsc.2002.1190480
发表时间：
2002-05
期刊：
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DOI：
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发表时间：
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影响因子：
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通讯作者：
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