Fabrication of 200 nm period hard X-ray phase gratings.

Fabrication of 200 nm period hard X-ray phase gratings.
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DOI:
10.1021/nl5009713
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发表时间:
2014-06-11
期刊:
影响因子:
10.8
通讯作者:
Wen H
Wen H
中科院分区:
材料科学1区
文献类型:
--
作者:
Miao H;Gomella AA;Chedid N;Chen L;Wen H

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远场X射线光栅干涉测量在弱吸收样品成像中实现了非凡的相位灵敏度,只要光栅周期在X射线源的横向相干长度内。在这里,我们描述了一种具有成本效益的工艺来制造大面积,100纳米半间距硬X射线相位光栅的纵横比为32。纳米光栅适用于普通紧凑的X射线源具有低的空间相干性,如通过X射线衍射实验所证明的。
Far field X-ray grating interferometry achieves extraordinary phase sensitivity in imaging weakly absorbing samples, provided that the grating period is within the transverse coherence length of the X-ray source. Here we describe a cost-efficient process to fabricate large area, 100 nm half-pitch hard X-ray phase gratings with an aspect ratio of 32. The nanometric gratings are suitable for ordinary compact X-ray sources having low spatial coherence, as demonstrated by X-ray diffraction experiments.
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