Fabrication of 200 nm period hard X-ray phase gratings.
Fabrication of 200 nm period hard X-ray phase gratings.
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DOI:
10.1021/nl5009713
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发表时间:
2014-06-11
期刊:
影响因子:
10.8
通讯作者:
Wen H
中科院分区:
文献类型:
--
作者:
Miao H;Gomella AA;Chedid N;Chen L;Wen H
Far field X-ray grating interferometry achieves extraordinary phase sensitivity in imaging weakly absorbing samples, provided that the grating period is within the transverse coherence length of the X-ray source. Here we describe a cost-efficient process to fabricate large area, 100 nm half-pitch hard X-ray phase gratings with an aspect ratio of 32. The nanometric gratings are suitable for ordinary compact X-ray sources having low spatial coherence, as demonstrated by X-ray diffraction experiments.
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DOI:
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发表时间:
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期刊:
Journal of micromechanics and microengineering : structures, devices, and systems
影响因子:
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作者:
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通讯作者:
Wen H