Preparation and tribological properties of DLC/Ti film by pulsed laser arc deposition
Preparation and tribological properties of DLC/Ti film by pulsed laser arc deposition
复制标题
脉冲激光电弧沉积DLC/Ti薄膜的制备及其摩擦学性能
DOI：
10.1088/1009-1963/15/11/039
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发表时间：
2006-11
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影响因子：
--
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中科院分区：
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采用脉冲激光电弧沉积法制备了类金刚石碳(DLC)/Ti薄膜。采用r -射线衍射、俄歇电子能谱、拉曼能谱、原子力显微镜、纳米压痕仪、光谱椭圆仪、表面轮廓仪和微摩擦计等对DLC/Ti和DLC薄膜的结构和摩擦学性能进行了研究。结果表明，DLC/Ti薄膜具有优异的力学性能和摩擦学性能，其I(D)/I(G)为0.28，对应拉曼光谱计算的sp3含量为76%，沿深度方向化学成分均匀，碳含量为98%，硬度为8.2 GPa，杨氏模量为110.5 GPa，压应力为6.579 GPa，厚度为46 nm，摩擦系数为0.08，临界载荷为95mN。
This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with I(D)/I(G) 0.28 and corresponding to 76% sp3 content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at% content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46 nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.
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