A chemisorption-based microcantilever chemical sensor for the detection of trimethylamine

A chemisorption-based microcantilever chemical sensor for the detection of trimethylamine
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一种基于化学吸附的微悬臂梁化学传感器,用于检测三甲胺

DOI:
10.1016/j.snb.2009.12.050
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发表时间:
2010-03
影响因子:
8.4
通讯作者:
Zheyao Wang
Zheyao Wang
中科院分区:
化学1区
文献类型:
--
作者:
Youzheng Zhou;Xin Huang;Rui Yang;Litian Liu;Zheyao Wang

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提出了一种基于自组装单分子膜(SAM)的压阻式微悬臂梁传感器检测气相和液体中三甲胺(TMA)的新方法。微悬臂梁由两层二氧化硅和介于其间的单晶硅压敏电阻组成。由于二氧化硅的低硬度和单晶硅的高压阻系数,这种配置允许微悬臂梁实现高灵敏度。微悬臂梁表面通过Au-SH共价键与沉积在微悬臂梁上的金膜自组装单分子膜11-MUA化学功能化。11-MUA SAM通过与TMA分子间的氢键吸附TMA,微悬臂梁因氢键吸附引起的表面应力变化而发生偏转。实验结果表明,微悬臂梁的挠度与甲基丙烯酸甲酯的浓度有关,液体甲基丙烯酸甲酯的最低检测下限为10 mg/L,气体甲基丙烯酸甲酯的最低检测下限为1.65μg/L。还考察了TMA对乙醇、丙酮和丁酮的选择性。
This paper presents a new method for detecting trimethylamine (TMA) in gas and liquid phases using a piezoresistive microcantilever sensor functionalized with a self-assembled monolayer (SAM). The microcantilever consists of two silicon dioxide layers and a single crystalline silicon piezoresistor in-between. This configuration allows microcantilevers to achieve high sensitivity because of the low stiffness of silicon dioxide and the high piezoresistive coefficients of single crystalline silicon. The surface of the microcantilever is chemically functionalized with a self-assembled monolayer of 11-mercaptoundecanoic acid (11-MUA) via Au–SH covalent bonding on a gold film deposited on the microcantilever. The 11-MUA SAM adsorbs TMA through hydrogen bonding between the SAM and TMA molecules, and the microcantilever is deflected by the changes in the surface stress as a result of the hydrogen bonding based chemisorption. Experimental results show that the deflection of the microcantilever depends on the concentration of TMA, and the minimum detection limits of 10mg/L for liquid TMA and 1.65μg/L for gas TMA are achieved. The selectivity of TMA with respect to ethanol, acetone, and butanone is also investigated.
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