Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor
Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor
复制标题
两步释放二氧化硅压阻微悬臂梁免疫传感器的设计、制造和表征
DOI：
10.1088/0960-1317/19/6/065026
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发表时间：
2009-06
影响因子：
2.3
通讯作者：
Chaonan Wang
中科院分区：
文献类型：
--
作者：
Wenzhou Ruan;Youzheng Zhou;Litian Liu;Zheyao Wang;Chaonan Wang
本文介绍了在绝缘体上硅 (SOI) 晶圆上制造的二氧化硅压阻微悬臂梁免疫传感器的设计、制造和表征。微悬臂梁由夹在两个二氧化硅层之间的两条单晶硅压敏电阻器组成。利用经典层合梁理论推导了具有不连续层的层合微悬臂梁的理论模型。开发了结合各向异性和各向同性蚀刻的两步释放方法来悬浮微悬臂梁，并且制造结果显示出良好的良率。讨论了残余应力引起的微悬臂梁自由弯曲和压敏电阻自加热引起的应力。微悬臂梁传感器的特点是利用抗原和抗体的特异性结合的免疫传感器。这些方法和一些结论也适用于其他采用层压结构的压阻传感器的开发。
This paper presents the design, fabrication and characterization of a silicon dioxide piezoresistive microcantilever immunosensor fabricated on silicon-on-insulator (SOI) wafers. The microcantilever consists of two strips of single crystalline silicon piezoresistors sandwiched in between two silicon dioxide layers. A theoretical model for the laminated microcantilever with a discontinuous layer is deduced using classic laminated beam theory. A two-step release method combining anisotropic and isotropic etching is developed to suspend the microcantilever, and the fabrication results show an excellent yield. The residual stress-induced free bending of the microcantilever and the stress caused by self-heating of the piezoresistors are discussed. The microcantilever sensor is characterized as an immunosensor using specific binding of antigen and antibody. These methods and some conclusions are also applicable to the development of other piezoresistive sensors that use laminated structures.
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影响因子：
4.6
作者：
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通讯作者：
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