Integration of a piezoresistive microprobe into a commercial gear measuring instrument
Integration of a piezoresistive microprobe into a commercial gear measuring instrument
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将压阻式微探针集成到商用齿轮测量仪器中
DOI：
10.1016/j.precisioneng.2018.10.003
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
D. Metz
中科院分区：
文献类型：
--
作者：
D. Metz
在过去的十年中，已经开发了各种微型探头来满足显微计量学的需要。然而，大多数微探头只在少数研究机构的专用测量机上使用，在行业中并不广泛。这项工作旨在将传统坐标测量机(CMM)的能力扩展到通过低成本集成触觉微探头来测量微观几何形状。为了证明这一点，最近开发的一种齿轮测量仪(GMI)配备了一种基于硅膜的微探头，该仪器是一种不专门用于微尺度测量的商用三坐标测量机。在本工作的第一部分中，描述了微探头的工作原理、它的组装以及它与GMI的集成。评估和测试了两种不同的将微探针安装到GMI上的设置。GMI上的测量是单独使用微探头或结合微探头和GMI上已有的测量系统进行的。这种组合使得能够有利地使用微探头并以舒适的半自动方式交换它。为了测试这两种安装方案，测量了一种新的具有波纹度的渐开线扫描伪影(SAFT)。
Various microprobes have been developed in the last decade to address the needs of micrometrology. However, most microprobes are only employed in specialized measuring machines located in a few research institutes and are not widespread in the industry. This work aims to extend the capabilities of conventional coordinate measuring machines (CMMs) towards measuring microgeometries through the low-cost integration of a tactile microprobe. In order to demonstrate this, a gear measuring instrument (GMI), which is a commercial CMM not specialized for measurements at the microscale, has been equipped with a recently developed silicon-membrane-based microprobe. In the first part of this work, the working principle of the microprobe, its assembly and its integration into the GMI are described. Two different mounting setups of the microprobe onto the GMI were evaluated and tested. Measurements on the GMI were performed solely with the microprobe or by combining the microprobe and the measurement system already present on the GMI. This combination makes it possible to use the microprobe advantageously and to exchange it in a comfortable semi-automatic way. To test these two mounting setups, a new involute scanning artifact (SAFT) with superimposed waviness was measured.
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