Bandwidth optimization design of a multi degree of freedom MEMS gyroscope.
Bandwidth optimization design of a multi degree of freedom MEMS gyroscope.
复制标题
多自由度MEMS陀螺仪带宽优化设计
DOI：
10.3390/s130810550
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发表时间：
2013-08-14
期刊：
影响因子：
--
通讯作者：
Yang F
中科院分区：
文献类型：
--
作者：
Si C;Han G;Ning J;Yang F
提出了一种新型的稳健多自由度MEMS陀螺仪。与已报道的多自由度MEMS陀螺仪相比，所设计的陀螺仪具有更易于调节的传感模式带宽和放大系数。此外，还提出了一种具有很小耦合刚度的新型弹簧系统，该系统有助于实现两自由度振动系统的窄带宽和高放大系数。设计了采用该弱弹簧系统的多自由度陀螺，仿真结果表明，当工作频率设置为12.59 kHz时，读出模式的平坦频率响应区可设计为窄至80 Hz，读出模式在工作频率下的放大倍数可达91，既保护了放大倍数不受工艺和温度变化的影响，又牺牲了较小的性能。为了验证设计的有效性，还进行了实验。采用所提出的弱耦合弹簧系统的多自由度陀螺仪能够在鲁棒性和性能之间取得良好的折衷。
A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small coupling stiffness is proposed, which helps achieve a narrow bandwidth and a high amplification factor for a 2-DOF vibration system. A multi-DOF gyroscope with the proposed weak spring system is designed, and simulations indicate that when the operating frequency is set at 12.59 kHz, the flat frequency response region of the sense mode can be designed as narrow as 80 Hz, and the amplification factor of the sense mode at the operating frequency is up to 91, which not only protects the amplification factor from instability against process and temperature variations, but also sacrifices less performance. An experiment is also carried out to demonstrate the validity of the design. The multi-DOF gyroscope with the proposed weak coupling spring system is capable of achieving a good tradeoff between robustness and the performance.
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影响因子：
4.3
作者：
Acar, Cenk;Schofield, Adam R.;Shkel, Andrei M.
通讯作者：
Shkel, Andrei M.
DOI：
10.1007/s00542-011-1315-x
发表时间：
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影响因子：
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通讯作者：
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影响因子：
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作者：
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影响因子：
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作者：
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通讯作者：
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