The low-temperature mobility of two-dimensional electron gas in AlGaN/GaN heterostructures

The low-temperature mobility of two-dimensional electron gas in AlGaN/GaN heterostructures
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AlGaN/GaN异质结构中二维电子气的低温迁移率

DOI:
10.1088/1674-1056/17/7/055
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发表时间:
2008-07
期刊:
影响因子:
1.7
通讯作者:
Mao Wei
Mao Wei
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Zhang Jin-Feng;Hao Yue;Zhang Jin-Cheng;Mao Wei

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为了揭示 Al-GaN/GaN 异质结构中二维电子气 (2DEG) 低温迁移率的内部物理原理,我们提出了 2DEG 迁移率对 Al 含量和 AlGaN 势垒层厚度强依赖性的理论研究。将理论结果与 AlGaN/GaN 异质结构报告的最高测量 2DEG 迁移率之一进行比较。 2DEG 迁移率被建模为散射机制的综合效应,包括声变形势、压电、电离背景施主、表面施主、位错、合金无序和界面粗糙度散射。对各个散射过程的分析表明,主要的散射机制是低温下的合金无序散射和界面粗糙度散射。 2DEG迁移率随势垒层参数的变化主要是由2DEG密度和分布的变化引起的。研究表明,在具有高Al含量或厚AlGaN层的AlGaN/GaN样品中,界面粗糙度散射可能会显着限制2DEG迁移率,因为AlGaN/GaN界面粗糙度由于AlGaN层中的应力积累而增加。
To reveal the internal physics of the low-temperature mobility of two-dimensional electron gas (2DEG) in Al-GaN/GaN heterostructures, we present a theoretical study of the strong dependence of 2DEG mobility on Al content and thickness of AlGaN barrier layer. The theoretical results are compared with one of the highest measured of 2DEG mobility reported for AlGaN/GaN heterostructures. The 2DEG mobility is modelled as a combined effect of the scattering mechanisms including acoustic deformation-potential, piezoelectric, ionized background donor, surface donor, dislocation, alloy disorder and interface roughness scattering. The analyses of the individual scattering processes show that the dominant scattering mechanisms are the alloy disorder scattering and the interface roughness scattering at low temperatures. The variation of 2DEG mobility with the barrier layer parameters results mainly from the change of 2DEG density and distribution. It is suggested that in AlGaN/GaN samples with a high Al content or a thick AlGaN layer, the interface roughness scattering may restrict the 2DEG mobility significantly, for the AlGaN/GaN interface roughness increases due to the stress accumulation in AlGaN layer.
DOI: --
发表时间: 2003
期刊: --
影响因子: --
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