Electrothermal simulation of the self-heating effects in 4H-SiC MESFETs

Electrothermal simulation of the self-heating effects in 4H-SiC MESFETs
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4H-SiC MESFET 自热效应的电热模拟

DOI:
10.1088/1674-1056/17/4/043
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发表时间:
2008-04
期刊:
影响因子:
1.7
通讯作者:
Zhang Yi-Men
Zhang Yi-Men
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Che Yong;Zhang Yu-Ming;Lu Hong-Liang;Zhang Yi-Men

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基于材料参数的温度依赖性和三区I - V模型,建立了4H-SiC MESFET的热模型。考虑自热效应对电子迁移率、饱和速度和导热系数等相关参数的影响,得到了4H-SiC MESFET的静态电流特性。采用等效导热模型对高压性能进行了分析。采用物理模拟的方法,研究了自热温度与衬底厚度和掺杂的关系。所得结果可用于硅基大功率场效应晶体管的热设计优化。
A thermal model of 4H-SiC MESFET is developed based on the temperature dependences of material parameters and three-region I - V model. The static current characteristics of 4H-SiC MESFET have been obtained with the consideration of the self-heating effect on related parameters including electron mobility, saturation velocity and thermal conductivity. High voltage performances are analysed using equivalent thermal conductivity model. Using the physical-based simulations, we studied the dependence of self-heating temperature on the thickness and doping of substrate. The obtained results can be used for optimization of the thermal design of the SiC-based high-power field effect transistors.
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