On the Luminescence Properties and Surface Passivation Mechanism of III- and N-Polar Nanopillar Ultraviolet Multiple-Quantum-Well Light Emitting Diodes

On the Luminescence Properties and Surface Passivation Mechanism of III- and N-Polar Nanopillar Ultraviolet Multiple-Quantum-Well Light Emitting Diodes
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III极和N极纳米柱紫外多量子阱发光二极管的发光性能和表面钝化机理研究

DOI:
10.3390/mi11060572
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发表时间:
2020-06
期刊:
影响因子:
3.4
通讯作者:
Ye Jichun
Ye Jichun
中科院分区:
工程技术3区
文献类型:
--
作者:
Sheikhi Moheb;Dai Yijun;Cui Mei;Li Liang;Liu Jianzhe;Lan Wenan;Jiang Rongrong;Guo Wei;Chee Kuan W. A.;Ye Jichun

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III 族氮化物纤锌矿晶体的非中心对称性使得金属或氮极性具有显着不同的表面能和光学性质。在这项工作中,通过纳米球光刻和反应离子刻蚀制备了 III 极性和 N 极性纳米结构紫外多量子阱 (UV-MQW)。仔细研究了 KOH 蚀刻和快速热退火处理对发光行为的影响,结果显示 III 极性纳米柱的发射强度最大增强因子为 2.4,但 N 极性纳米柱的发光强度没有显着改善。 III 极和 N 极纳米柱 MQW 之间光学行为的差异源于 III 极表面中的载流子局域化,因为通过阴极发光映射发现了铟成分的不均匀性,并且观察到了缺陷不敏感的发射特性。因此,即使在制造后的表面处理之后,诸如穿透位错或点缺陷之类的非辐射复合中心也不太可能影响光学性能。该工作为未来研究表面处理对III极和N极纳米结构发光二极管的影响奠定了坚实的基础,并为纳米结构光子器件的设计提供了一条有前景的途径。
The non-centrosymmetricity of III-nitride wurtzite crystals enables metal or nitrogen polarity with dramatically different surface energies and optical properties. In this work, III-polar and N-polar nanostructured ultraviolet multiple quantum wells (UV-MQWs) were fabricated by nanosphere lithography and reactive ion etching. The influence of KOH etching and rapid thermal annealing treatments on the luminescence behaviors were carefully investigated, showing a maximum enhancement factor of 2.4 in emission intensity for III-polar nanopillars, but no significant improvement for N-polar nanopillars. The discrepancy in optical behaviors between III- and N-polar nanopillar MQWs stems from carrier localization in III-polar surface, as indium compositional inhomogeneity is discovered by cathodoluminescence mapping, and a defect-insensitive emission property is observed. Therefore, non-radiative recombination centers such as threading dislocations or point defects are unlikely to influence the optical property even after post-fabrication surface treatment. This work lays solid foundation for future study on the effects of surface treatment on III- and N-polar nanostructured light-emitting-diodes and provides a promising route for the design of nanostructure photonic devices.
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