Selective-area growth of periodic nanopyramid light-emitting diode arrays on GaN/sapphire templates patterned by multiple-exposure colloidal lithography

Selective-area growth of periodic nanopyramid light-emitting diode arrays on GaN/sapphire templates patterned by multiple-exposure colloidal lithography
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通过多次曝光胶体光刻图案化的 GaN/蓝宝石模板上周期性纳米金字塔发光二极管阵列的选择性区域生长

DOI:
10.1088/1361-6528/aa5abe
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发表时间:
2017-02
期刊:
影响因子:
3.5
通讯作者:
Wang Junxi
Wang Junxi
中科院分区:
材料科学3区
文献类型:
--
作者:
Xiong Zhuo;Wei Tongbo;Zhang Yonghui;Zhang Xiang;Yang Chao;Liu Zhiqiang;Yuan Guodong;Li Jinmin;Wang Junxi

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基于氮化镓的纳米金字塔发光二极管是一种很有前途的技术,可以实现高效的固态照明。本文采用选择性面积金属有机化学气相沉积和多次曝光胶体光刻技术,在氮化镓/蓝宝石模板上制备了周期性纳米锥体发光二极管阵列。采用时域有限差分法模拟了入射光穿过聚苯乙烯微球和光阻剂时的电场强度分布。氮作为载气和低V/III比(V族源与III族源的摩尔流速之比)是形成氮化镓纳米锥体的重要条件。此外,在光致发光光谱和阴极发光光谱中观察到广泛的黄色发射。这一现象显示了纳米锥体发光二极管实现长波可见光发射的潜力。
Gallium nitride-based nanopyramid light-emitting diodes are a promising technology to achieve highly efficient solid-state lighting and beyond. Here, periodic nanopyramid light-emitting diode arrays on gallium nitride/sapphire templates were fabricated by selective-area metalorganic chemical vapor deposition and multiple-exposure colloidal lithography. The electric field intensity distribution of incident light going through polystyrene microspheres and photoresist are simulated using finite-different time-domain method. Nitrogen as the carrier gas and a low V/III ratio (ratio of molar flow rate of group-V to group-III sources) are found to be important in order to form gallium nitride nanopyramid. In addition, a broad yellow emission in photoluminescence and cathodoluminescence spectra were observed. This phenomena showed the potential of nanopyramid light-emitting diodes to realize long wavelength visible emissions.
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