An effect of laser pre-annealing on the enhancement of light emission of Si nanocrystal thin film

An effect of laser pre-annealing on the enhancement of light emission of Si nanocrystal thin film
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激光预退火对Si纳米晶薄膜发光增强的影响

DOI:
10.1016/j.matlet.2012.08.037
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发表时间:
2012-12
期刊:
影响因子:
3
通讯作者:
陆明
陆明
中科院分区:
材料科学3区
文献类型:
--
作者:
陆明

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采用co2激光对SiO/Si多层薄膜进行点对点扫描,然后在1100℃的温度下进行热处理,形成相分离的Si纳米晶体(Si- ncs)。这种激光预退火处理可以将Si-NC的光致发光和电致发光强度提高约3倍。表征测量表明,这种增强是由于Si- nc产生了额外的成核位点,这抑制了大尺寸和低发光Si颗粒的形成,并增加了高发光Si- nc的密度。
A multilayered thin film of SiO/Si has been irradiated by CO2laser in a dot by dot scanning mode, followed by furnace thermal annealing at 1100°C to form Si nanocrystals (Si-NCs) via a phase separation process. Such a laser pre-annealing treatment could enhance the intensities of photoluminescence and electroluminescence of Si-NC by a factor of ∼3 for both. Characterization measurements show that the enhancements are due to the production of extra nucleation sites for Si-NCs, which suppresses the formation of large sized and poorly luminescent Si particles and increases the density of highly luminescent Si-NC.
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