Epitaxially Grown Indium Phosphide Quantum Dots on a Virtual Ge Substrate Realized on Si(001)

Epitaxially Grown Indium Phosphide Quantum Dots on a Virtual Ge Substrate Realized on Si(001)
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在 Si(001) 上实现的虚拟 Ge 衬底上外延生长的磷化铟量子点

DOI:
10.1143/apex.5.042001
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发表时间:
2012
影响因子:
2.3
通讯作者:
P. Michler
P. Michler
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
M. Wiesner;M. Bommer;W.-M. Schulz;M. Etter;J. Werner;M.Oehme;J. Schulze;M. Jetter;P. Michler

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采用分子束外延技术在与CMOS兼容的Si(001)衬底上实现了低缺陷密度的超薄虚拟Ge衬底(GeVS)。采用金属-有机气相外延技术沉积了III-V层,成功地抑制了Ge的扩散。基于InP量子点(QD)的非经典发光器件是在厚度为1µm的GaAs缓冲层上实现的。量子点在红光区显示发射,满足硅雪崩光电二极管最高探测效率的范围。研究了单量子点的衰减动力学和发射特性。自相关测量证实了g(2)(0)=0.32的单光子发射。
An ultrathin virtual Ge substrate (GeVS) with low defect density was realized on CMOS-compatible Si (001) by molecular beam epitaxy. On top, III–V layers were deposited by metal–organic vapor-phase epitaxy, at which diffusion of Ge was successfully suppressed. Nonclassical light emitters, based on InP quantum dots (QDs), were realized on a thin GaAs buffer (thickness≈ 1 µm). The quantum dots show emission in the red spectral region, meeting the range of the highest detection efficiency of silicon avalanche photodiodes. The decay dynamics and emission characteristics of single QDs were investigated. Autocorrelation measurements prove single-photon emission with a value of g (2)(0)= 0.32.
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