Application of the digital phase-shifting method in 3D deformation measurement at micro-scale by SEM
Application of the digital phase-shifting method in 3D deformation measurement at micro-scale by SEM
复制标题
数字相移法在SEM微尺度3D变形测量中的应用
DOI：
10.1088/0957-0233/25/12/125002
复制
发表时间：
2014-12
影响因子：
2.4
通讯作者：
Wang Rong
中科院分区：
文献类型：
--
作者：
Li Chuanwei;Li Chuanwei;Wang Rong;Wang Rong
在宏观尺度上已经有很多三维（3D）变形测量的方法，但由于分辨率低，这些方法大多不适用于微观尺度的三维变形测量。随着……的广泛应用
There have been many approaches for three-dimensional (3D) deformation measurement at the macro-scale, but these methods are mostly not applicable to 3D deformation measurement at the micro-scale due to the low resolution. With the broad application of the scanning electron microscope (SEM) at micro-scale measurement, in-situ deformation measurement under SEM has been made feasible. The 3D deformation measurement method based on digital phase shifting and the SEM system is proposed in this paper. In the proposed method, two SEM images of a specimen grating at different tilting angles are required to solve the in-plane and out-of-plane displacement. The digital generated reference grating is superimposed with the SEM images of a the specimen grating at different tilting angles to form the digital moiré. Using the digital phase-shifting method, the phase information of the grating at different tilting angles can be acquired. With the derived relationship between the phase of the grating at different tilting angles and the in-plane and out-of-plane displacement, 3D displacement can be obtained. To verify the feasibility and assess the accuracy, a numerical experiment is conducted to reverse the given in-plane and out-of-plane deformation. The proposed method is used to measure the out-of-plane deformation of aluminum film on a soft substrate. The successful results indicate that this method is feasible and has the potential to be applied in 3D deformation measurement at micro-scale.
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影响因子：
1.3
作者：
Y. Arai;S. Yokozeki
通讯作者：
Y. Arai;S. Yokozeki
影响因子：
2.4
作者：
Tao Zhu;Michael A. Sutton;N. Li;J. Orteu;N. Cornille;Xiaodong Li;Anthony P. Reynolds
通讯作者：
Tao Zhu;Michael A. Sutton;N. Li;J. Orteu;N. Cornille;Xiaodong Li;Anthony P. Reynolds
DOI：
10.1007/s12647-011-0007-4
发表时间：
2011-05
期刊：
MAPAN
影响因子：
--
作者：
Y. Arai;M. Ando;S. Kanameishi;S. Yokozeki
通讯作者：
Y. Arai;M. Ando;S. Kanameishi;S. Yokozeki
影响因子：
3.8
作者：
Chuanwei Li;Zhanwei Liu;H. Xie;Dan Wu
通讯作者：
Chuanwei Li;Zhanwei Liu;H. Xie;Dan Wu
影响因子：
5
作者：
C. Quan;C. Tay;Xiaoyuan He;X. Kang;H. Shang
通讯作者：
C. Quan;C. Tay;Xiaoyuan He;X. Kang;H. Shang