AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor.
AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor.
复制标题
AlN 基陶瓷贴片天线型无线无源高温传感器。
DOI：
10.3390/mi8100301
复制
发表时间：
2017-10-10
期刊：
影响因子：
3.4
通讯作者：
Xiong J
中科院分区：
文献类型：
--
作者：
Yan D;Yang Y;Hong Y;Liang T;Yao Z;Chen X;Xiong J
报道了一种基于氮化铝（AlN）的贴片天线式高温无线无源传感器，该传感器兼具传感器和天线的双重功能，集现场测量/传感与远程无线通信于一体。该传感器体积小，易于制造，灵敏度高，工作温度高，可用于高温，化学腐蚀等恶劣环境。传感器的敏感机制，AlN陶瓷基板的介电常数，随着温度的升高而增加，这降低了传感器的谐振频率。因此，可以通过检测传感器的谐振频率的变化来测量温度。高频仿真结构（HFSS）软件被用来确定传感器的结构和尺寸，然后使用厚膜技术制造。该传感器的基片为AlN陶瓷，具有优异的高温耐热性，其导体（基片下的辐射贴片和接地）为银钯膏烧结而成的银钯合金。矢量网络分析仪显示，传感器的工作范围可扩展到700 °C。此外，它的谐振频率从2.20 GHz下降到2.13 GHz的温度从室温（25 °C）增加到700 °C，与104.77 KHz/°C的绝对灵敏度。验证了AlN基贴片天线无线无源温度传感器测量高温的可行性，为恶劣环境下的高温测量提供了一种新的材料和温敏结构。
An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensitive and has a high operating temperature; it can be used in high-temperature, chemically corrosive and other harsh environments. The sensing mechanism of the sensor, the dielectric constant of the AlN ceramic substrate, increases with rising temperature, which reduces the resonant frequency of the sensor. Thus, the temperature can be measured by detecting changes in the sensor’s resonant frequency. High-Frequency Simulation Structure (HFSS) software is used to determine the structure and size of the sensor, which is then fabricated using thick-film technology. The substrate of the sensor is AlN ceramic due to its outstanding thermal resistance at high temperature; and its conductors (the radiation patch and the ground under the substrate) are silver-palladium alloy sintered form silver–palladium paste. A vector network analyzer reveals that the sensor’s operating range extends to 700 °C. Furthermore, its resonant frequency decreases from 2.20 GHz to 2.13 GHz with increasing temperature from room temperature (25 °C) to 700 °C, with an absolute sensitivity of 104.77 KHz/°C. Our work verifies the feasibility of measuring high temperatures using AlN-based patch antenna wireless passive temperature sensors, and provides a new material and temperature sensitive structure for high-temperature measurement in harsh environments.
登录
查看更多内容
影响因子：
4.3
作者：
Binder, Alfred;Bruckner, Gudrun;Schmitt, Daniel
通讯作者：
Schmitt, Daniel
影响因子：
2.4
作者：
Deshmukh, S.;Huang, H.
通讯作者：
Huang, H.
影响因子：
11.2
作者：
Habib, Zehra;Parthasarathy, Ramkumar;Gollahalli, Subramanyam
通讯作者：
Gollahalli, Subramanyam
影响因子：
1.6
作者：
Nowak, Damian;Dziedzic, Andrzej
通讯作者：
Dziedzic, Andrzej
DOI：
10.1109/tchmt.1985.1136500
发表时间：
1985-01-01
期刊：
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY
影响因子：
--
作者：
KUROKAWA, Y;UTSUMI, K;NOGUCHI, S
通讯作者：
NOGUCHI, S