Precise extension-mode resonant sensor with uniform and repeatable sensitivity for detection of ppm-level ammonia
Precise extension-mode resonant sensor with uniform and repeatable sensitivity for detection of ppm-level ammonia
复制标题
精确的延伸模式谐振传感器，具有均匀且可重复的灵敏度，可检测 ppm 级氨
DOI：
10.1088/0960-1317/24/4/045005
复制
发表时间：
2014-03
影响因子：
2.3
通讯作者：
Li, Xinxin
中科院分区：
文献类型：
--
作者：
Yu, Feng;Yu, Feng;Yu, Haitao;Yu, Haitao;Xu, Pengcheng;Xu, Pengcheng;Li, Xinxin;Li, Xinxin
提出了一种用于超低浓度化学气体高精度传感的微机械谐振式气体传感器。设计和制造的重量共振微传感器在空气中表现出11157的高Q因子和10.16 Hz pg−1的高质量灵敏度。更重要的是，理论分析和感测实验都证实了这种延伸谐振模式在感测精度方面是技术上有利的（例如，在气体浓度和灵敏度再现性方面的输出信号线性度），这可以归因于气体吸附区域的每个点处的均匀振动幅度。该化学传感微谐振器以具有超大表面积的-COOH功能化介孔二氧化硅纳米颗粒为传感材料，对ppm级氨蒸气进行了精确的检测。检测限低至1 ppm，传感器的响应时间短至10 s。
This paper presents a micromechanical resonant gas sensor, which is operated in extensional bulk mode, for high-accuracy sensing of ultra-low concentration chemical vapors. The designed and fabricated gravimetric resonant microsensor has exhibited both high Q-factor of 11157 in air and high mass sensitivity of 10.16 Hz pg−1. Much more importantly, both theoretical analysis and sensing experiment have verified that such an extensional resonance mode is technically advantageous in sensing accuracy (e.g., output signal linearity in terms of gas concentration and reproducibility of sensitivity), which can be attributed to the uniform vibration amplitude at each point of the gas-adsorbing area. Loaded with –COOH functionalized mesoporous-silica nanopaticles as sensing material, which features an ultra-large surface area, the chemical sensing micro-resonator experimentally performs precise detection performance to ppm-level ammonia vapor. The limit of detection is as low as 1 ppm and the response time of the sensor is as short as 10 s.
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DOI：
10.1109/memsys.2006.1627948
发表时间：
2006-05
期刊：
19th IEEE International Conference on Micro Electro Mechanical Systems
影响因子：
--
作者：
G. Ho;K. Sundaresan;S. Pourkamali;F. Ayazi
通讯作者：
G. Ho;K. Sundaresan;S. Pourkamali;F. Ayazi
影响因子：
2.3
作者：
X. Xia;Zhixiang Zhang;Xinxin Li
通讯作者：
X. Xia;Zhixiang Zhang;Xinxin Li
影响因子：
4.6
作者：
G. Piazza;R. Abdolvand;G. Ho;F. Ayazi
通讯作者：
G. Piazza;R. Abdolvand;G. Ho;F. Ayazi
影响因子：
2.3
作者：
Jin, Dazhong;Li, Xinxin;Yu, Haitao
通讯作者：
Yu, Haitao
影响因子：
2.8
作者：
Liu, Yongjing;Li, Xinxin;Yu, Haitao
通讯作者：
Yu, Haitao