Improvement in Bias Stability of IGZO TFT With Etching Stop Structure by UV Irradiation Treatment of Active Layer Island
Improvement in Bias Stability of IGZO TFT With Etching Stop Structure by UV Irradiation Treatment of Active Layer Island
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通过有源层岛的紫外辐照处理提高具有蚀刻停止结构的IGZO TFT的偏压稳定性
DOI:
10.1109/jeds.2020.2983251
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发表时间:
2020
影响因子:
2.3
通讯作者:
Jian-Hua Zhang
中科院分区:
文献类型:
--
作者:
Cheng-Chao Pan;Shi-Bo Yang;Long-Long Chen;Ji-Feng Shi;Xiang Sun;Xi-Feng Li;Jian-Hua Zhang
In this paper, the effect of ultraviolet (UV) irradiation treatment of active layer IGZO on the bias stability of amorphous IGZO thin film transistor with etch stop (ES) structure is studied. Along with the increase in UV irradiation time, the surface of
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影响因子:
1.5
作者:
H. Yun;Young-Su Kim;K. Jeong;Y. Kim;Seung-Dong Yang;H. Lee;Ga-Won Lee
通讯作者:
H. Yun;Young-Su Kim;K. Jeong;Y. Kim;Seung-Dong Yang;H. Lee;Ga-Won Lee
影响因子:
3.7
作者:
Y. J. Tak;S. Park;Tae Soo Jung;Heesoo Lee;Won-Gi Kim;J. Park;Hyun Jae Kim
通讯作者:
Y. J. Tak;S. Park;Tae Soo Jung;Heesoo Lee;Won-Gi Kim;J. Park;Hyun Jae Kim
DOI:
10.3390/ma11091761
发表时间:
2018-09-18
期刊:
Materials (Basel, Switzerland)
影响因子:
--
作者:
Wan L;He F;Qin Y;Lin Z;Su J;Chang J;Hao Y
通讯作者:
Hao Y
影响因子:
2.1
作者:
Wing-Man Tang;M. Greiner;Zhenghong Lu;W. Ng;H. Nam
通讯作者:
Wing-Man Tang;M. Greiner;Zhenghong Lu;W. Ng;H. Nam
影响因子:
64.8
作者:
Nomura, K;Ohta, H;Hosono, H
通讯作者:
Hosono, H