Improvement in Bias Stability of IGZO TFT With Etching Stop Structure by UV Irradiation Treatment of Active Layer Island

Improvement in Bias Stability of IGZO TFT With Etching Stop Structure by UV Irradiation Treatment of Active Layer Island
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通过有源层岛的紫外辐照处理提高具有蚀刻停止结构的IGZO TFT的偏压稳定性

DOI:
10.1109/jeds.2020.2983251
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发表时间:
2020
影响因子:
2.3
通讯作者:
Jian-Hua Zhang
Jian-Hua Zhang
中科院分区:
工程技术3区
文献类型:
--
作者:
Cheng-Chao Pan;Shi-Bo Yang;Long-Long Chen;Ji-Feng Shi;Xiang Sun;Xi-Feng Li;Jian-Hua Zhang

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In this paper, the effect of ultraviolet (UV) irradiation treatment of active layer IGZO on the bias stability of amorphous IGZO thin film transistor with etch stop (ES) structure is studied. Along with the increase in UV irradiation time, the surface of
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