A high-efficient precision grinding for fabricating moderately thick plane mirror (MTPM)
A high-efficient precision grinding for fabricating moderately thick plane mirror (MTPM)
复制标题
一种用于制造中等厚度平面镜（MTPM）的高效精密磨削
DOI：
10.1007/s00170-018-1793-4
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发表时间：
2018-02
影响因子：
3.4
通讯作者：
Guo Dongming
中科院分区：
文献类型：
--
作者：
Wang Ziguang;Yan Ying;Zhou Ping;Si Likun;Kang Renke;Guo Dongming
平面反射镜广泛应用于各种光学系统中。光学系统的性能在很大程度上取决于平面镜的表面质量和平面度，而平面镜的表面质量和平面度是通过磨削或研磨后抛光或修整来实现的。磨削加工是一种高效的平面镜加工方法，在抛光前可获得合适的尺寸精度。然而，安装或夹紧力引起的反射镜变形会影响最终的面形精度，特别是对于具有中等厚度特征的平面反射镜。提出了一种采用回转磨削技术和变形补偿方法加工中厚平面镜的新方法。通过测量平面镜装夹过程中的弹性变形，以及砂轮主轴姿态角与平面镜表面轮廓之间的数学关系，可以有效地加工出高精度的平面镜。利用该方法加工了Φ100 mm × 6 mm的硅反射镜。实验结果表明，在15 μm/min的进给速度下，硅镜的厚度被去除了15 μm，硅镜表面的峰谷值（PV）由4.80 μ m减小到1.32 μm。用原子力显微镜（AFM）测量了表面粗糙度Ra的平均值为9.6nm。研究表明，该方法加工出的MTPM具有良好的加工质量和平面度。
Plane mirrors have been widely used in various optical systems. The performance of optical systems relies heavily on the surface quality and flatness of plane mirror which are achieved by grinding or lapping followed by polishing or figuring. It is widely acknowledged that grinding is a high efficient method to machine plane mirrors with appropriate dimensional accuracy before polishing. However, the deformation of mirror induced by the mounting or clamping force will influence the final surface shape accuracy especially for the plane mirror with a feature of moderate thickness. In this paper, a new method is proposed for machining a moderately thick plane mirror (MTPM) employing the rotational grinding technique and the deformation compensation method. An accurate plane mirror can be machined efficiently relying on measuring the elastic deformation of the mirror in the clamping process and the mathematic relationship between the posture angles of grinding wheel spindle and surface profile of the plane mirror. A Φ100 mm × 6 mm silicon mirror (Si mirror) is machined based on the proposed method. The experiment results show that the Si mirror is totally removed 15 μm in thickness with feed rate of 15 μm/min and the peak and valley (PV) value of the Si mirror surface is reduced from 4.80 to 1.32 μm. The average value of the surface roughnessRa9.6 nm is measured by means of the atom force microscope (AFM). The research indicates that the proposed method is excellent in machining MTPM with high quality and flatness.
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DOI：
--
发表时间：
2003
期刊：
--
影响因子：
--
作者：
S. Chidambarama;Z. J. Peia;S. Kassirb
通讯作者：
S. Chidambarama;Z. J. Peia;S. Kassirb
DOI：
10.1117/12.2199178
发表时间：
2015-10
期刊：
--
影响因子：
--
作者：
Liang Liu;Shu-li Lou;You-Jin He;Haiyan Li;Jiancun Ren;Jianqian Yang
通讯作者：
Liang Liu;Shu-li Lou;You-Jin He;Haiyan Li;Jiancun Ren;Jianqian Yang
影响因子：
4
作者：
H. Mimura;H. Yumoto;S. Matsuyama;Y. Sano;K. Yamamura;Y. Mori;M. Yabashi;Y. Nishino;K. Tamasaku;T. Ishikawa;K. Yamauchi
通讯作者：
H. Mimura;H. Yumoto;S. Matsuyama;Y. Sano;K. Yamamura;Y. Mori;M. Yabashi;Y. Nishino;K. Tamasaku;T. Ishikawa;K. Yamauchi
DOI：
10.1007/s00170-005-2508-1
发表时间：
2006-03
期刊：
The International Journal of Advanced Manufacturing Technology
影响因子：
--
作者：
H. Young;H. Liao;H. Y. Huang
通讯作者：
H. Young;H. Liao;H. Y. Huang
DOI：
10.1016/j.jmatprotec.2007.04.091
发表时间：
2007-10-01
影响因子：
6.3
作者：
Tam, H. Y.;Cheng, H. B.;Wang, Y. W.
通讯作者：
Wang, Y. W.