Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology

Holding-voltage drift of a silicon-controlled rectifier with different film thicknesses in silicon-on-insulator technology
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绝缘体上硅技术中不同膜厚可控硅的保持电压漂移

DOI:
10.1088/1674-4926/33/3/034006
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发表时间:
2012-03
影响因子:
5.1
通讯作者:
Han, Zhengsheng1
Han, Zhengsheng1
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Jiang, Yibo1;Zeng, Chuanbin1;Du, Huan1;Luo, Jiajun1;Han, Zhengsheng1

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本文提出了一种新的现象,即硅控整流器的保持电压在不同的膜厚绝缘体上硅(SOI)技术作为一个静电放电保护漂移。用0.18 μ mSOI工艺制作的芯片证实了这一现象。通过伊势TCAD模拟,对保持电压漂移进行了模拟,并对其机理进行了全面的讨论。
This paper presents a new phenomenon, where the holding-voltage of a silicon-controlled rectifier acts as an electrostatic-discharge protection drift in diverse film thicknesses in silicon-on-insulator (SOI) technology. The phenomenon was demonstrated through fabricated chips in 0.18 μm SOI technology. The drift of the holding voltage was then simulated, and its mechanism is discussed comprehensively through ISE TCAD simulations.
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