Superlattice-like GaSb/Sb2Te3 films for low-power phase change memory

Superlattice-like GaSb/Sb2Te3 films for low-power phase change memory
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用于低功耗相变存储器的类超晶格 GaSb/Sb2Te3 薄膜

DOI:
10.1016/j.scriptamat.2012.01.013
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发表时间:
2012-05
期刊:
影响因子:
6
通讯作者:
Liu, Bo
Liu, Bo
中科院分区:
材料科学1区
文献类型:
--
作者:
Lu, Yegang;Song, Sannian;Song, Zhitang;Ren, Wanchun;Xiong, Yulin;Rao, Feng;Wu, Liangcai;Cheng, Yan;Liu, Bo

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超晶格GaSb/Sb_2Te_3薄膜的晶化温度可以通过改变GaSb和Sb_2Te_3层的界面数目和厚度比来改变。对于GaSb(4 Nm)/Sb2Te3(6 Nm)相变存储器测试单元,只需20 ns的电脉冲就可以完成重置操作。该电池的寿命可达1.4×104次。热模拟证实,超晶格GaSb/Sb2Te3薄膜性能的提高源于其低的热导率和低的熔点。
The crystallization temperature of superlattice-like GaSb/Sb2Te3films can be easily changed by the number of interfaces and thickness ratio between GaSb and Sb2Te3layers. The reset operation can be completed by an electric pulse as short as 20ns for the GaSb(4nm)/Sb2Te3(6nm)-based phase-change memory test cell. This test cell exhibited endurance up to 1.4×104cycles. The thermal simulation confirmed that the improved performance of superlattice-like GaSb/Sb2Te3films originated from the low thermal conductivity and low melting point.
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