Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition
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基于模板电化学沉积的高纵横比多样化等离子体金属纳米结构
DOI：
10.1088/1361-6439/ac5b1b
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发表时间：
2022-03
影响因子：
2.3
通讯作者：
Junjie Li
中科院分区：
文献类型：
--
作者：
Ruhao Pan;Qiulin Liu;Guodong Li;Yang Yang;Guangzhou Geng;Chensheng Li;Junxiang Yan;Zhongshan Zhang;Huaizhou Zhao;Changzhi Gu;Junjie Li
抽象的。金属高纵横比（HAR）纳米结构由于其相对于二维图案在高度空间上额外的可控程度，为一系列等离子体激元器件提供了新的机会，但由于传统方法加工能力的限制，目前还没有适合于快速制备大面积HAR结构的有效方法。在这项工作中，我们开发了一种模板电化学沉积（ECD）方法来制造各种HAR金属纳米结构的多样化等离子体器件。模板化ECD方法基于通过电子束光刻制造的纳米孔的ECD填充。利用这种模板ECD方法，在大规模上建立了许多HAR架构，包括纳米棒、纳米鳍甚至蘑菇状结构，其线宽小至100 nm，纵横比高达10：1。同时考虑到边缘效应和版图设计，制备了亚10 nm的纳米间隙阵列，其纵横比达到100：1，差距宽度减小到5 nm。由于Fabry-Perot共振所带来的极端光限制能力，HAR纳米间隙可以被视为表面增强拉曼散射（Sers）衬底。有限域时间差分模拟表明，高度为700 nm的10 nm扇形纳米间隙具有最大的光增强因子（EF）。优化配置的纳米间隙能够检测浓度为10−9 M的罗丹明6 G。计算出该纳米间隙Sers EF值为4 × 106，表明该HAR纳米间隙具有超灵敏的分子检测能力。模板ECD方法不仅为HAR金属三维结构的构建带来了新的契机，而且为一系列等离子体器件的设计开辟了新的视野。
Abstract. Metallic high aspect ratio (HAR) nano-architectures provide new opportunities for a series of plasmonic devices due to their additional controllable degrees in height space compared to 2D patterns, but there is no efficient way that suitable for the rapid fabrication of large area HAR structures limited by the processing ability of traditional methods. Here in this work, we have developed a templated electrochemical deposition (ECD) method to fabricate various HAR metallic nano-structures for diversified plasmonic devices. The templated ECD method is based on the ECD filling of the nanopores that are fabricated by electron beam lithography. With this templated ECD method, numbers of HAR architectures including nanorods, nanofins and even mushroom-like structures, which have a line width as small as 100 nm and the aspect ratio up to 10:1, are established over a large scale. What is more, by simultaneously considering the designed layout and edge effect, sub 10 nm nanogap arrays are prepared, whose aspect ratio reaches 100:1 and the gap width reduces to 5 nm. Due to the extreme light confinement ability brought from Fabry–Perot resonance, the HAR nanogaps can be treated as a surface enhanced Raman scattering (SERS) substrate. Finite domain time difference simulation shows that fan-like 10 nm nanogap with a height of 700 nm has the largest light enhancement factor (EF). The configuration optimized nanogap is capable for the sensing of rhodamine 6G with a 10−9 M concentration. And the SERS EF of the nanogap is calculated to be 4 × 106, indicating the ultrasensitive molecular detection ability of the HAR nanogap. The templated ECD method not only brings a new chance for the construction of HAR metallic 3D structures, but also opens up a new horizon for the design of a series of plasmonic devices.
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影响因子：
4.6
作者：
Chen B;Wang X;Gao B;Fang Z;Kang J;Liu L;Liu X;Lo GQ;Kwong DL
通讯作者：
Kwong DL
影响因子：
17.1
作者：
Laney, Sophia Katharine;Li, Tao;Papakonstantinou, Ioannis
通讯作者：
Papakonstantinou, Ioannis
影响因子：
29.4
作者：
Sol‐Ah Lee;H. Kang;Jung-Ki Park;Seungwook Lee
通讯作者：
Sol‐Ah Lee;H. Kang;Jung-Ki Park;Seungwook Lee
影响因子：
3.5
作者：
Gorelick, Sergey;Guzenko, Vitaliy A.;David, Christian
通讯作者：
David, Christian
影响因子：
10.8
作者：
Kim, Myung-Ki;Sim, Hongchul;Lee, Yong-Hee
通讯作者：
Lee, Yong-Hee