Catalytic Etching of Metals

这是对自由基和金属之间直接相互作用的影响的研究。它的目的是检验一种关于金属箔和薄膜蚀刻机理的假说，该假说是为了解释以前工作的结果而制定的。首先研究了重氮甲烷或乙烯酮的紫外光分解产生的亚甲基自由基，然后研究了包括甲基和氧原子在内的其他自由基。在各种氧化体系中，包括乙烯、氢、氨和丙烷的氧化体系中，包括铂、铂合金、钯和银在内的各种金属上的蚀刻现象正在被研究。这些研究的结果将被应用于集成电路用催化剂的再分散和薄膜的选择性刻蚀。

This is a study of the effects of direct interactions between free radicals and metals. It is designed to test a hypothesis on the mechanism of etching of metal foils and thin films formulated to account for the results of previous work. Methylene radicals, produced by ultraviolet photodecomposition of diazomethane or ketene are studied first, followed by other radicals including methyl and oxygen atoms. The occurrence of etching in various oxidation systems, including those for ethylene, hydrogen, ammonia, and propane, is being investigated over a variety of metals including platinum, platinum alloys, palladium, and silver. The results of these studies will then be applied to catalyst redispersion and selective etching of thin films for integrated circuits.