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REU: Study of a Surface Acoustic Wave Microsensor for Gas Detection

REU: Study of a Surface Acoustic Wave Microsensor for Gas Detection
REU:用于气体检测的表面声波微传感器的研究
批准号:
8619520
负责人:
John Vetelino
金额:
$61.19万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1987
资助国家:
美国
项目状态:
已结题
起止时间:
1987-05-15 至 1990-10-31

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中文摘要
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英文摘要
This research is aimed at developing an improved understanding of surface acoustic wave (SAW) microsensors for gas detection. The potential performance of the proposed sensor is in the range of parts per billion to parts per trillion. The proposed sensor will use twin SAW delay lines, and it will measure gas concentration as a function of the frequency shift between the reference delay line and the delay line of the test sensor containing a selectively sorbent film. The interdisciplinary research effort will include development of the theory, design, fabrication, and testing of SAW devices, and the physics and chemistry of surfaces needed to realize the potential of this type of sensor.
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