Travel to Attend: 32nd International Symposium on Electron,Ion and Photon Beams, Fort Lauderdale, Florida May 31 - June 2, 1988

前往参加：第 32 届电子、离子和光子束国际研讨会，佛罗里达州劳德代尔堡，1988 年 5 月 31 日至 6 月 2 日

• 批准号: 8813290
• 负责人: Evelyn Hu
• 金额: $ 0.5万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-05-01 至 1988-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8813290&HistoricalAwards=false
• 关键词: Travel; Attend; 32nd; International; Symposium

This grant will facilitate increased University participation in the 32nd International Symposium on Electron, Ion and Photon Beams, to be held May 31 -June 3, 1988 in Fort Lauderdale, Florida. This is the outstanding conference on microfabrication; it is a cross-disciplinary conference that focuses in a way that few other conferences do on the complement of high resolution lithography, dry etch transfer, materials science, surface chemistry and innovative devices of reduced dimension. There are other conferences that address each of the subject areas separately, and to some extent, but not with the emphasis on microfabrication for the advancement of the science of microstructures. An important feature that distinguishes this conference is the archival publication of all accepted papers in the Journal of Vacuum Science and Technology; we may thus disseminate the important results of this conference to a wide audience.

这笔赠款将促进大学更多地参与1988年5月31日至6月3日在佛罗里达州劳德代尔堡举行的第32届电子、离子束和光子国际研讨会。这是一次杰出的微制造会议；它是一个跨学科的会议，以一种其他会议很少有的方式专注于高分辨率光刻、干法蚀刻转移、材料科学、表面化学和降维创新器件的补充。还有其他会议分别讨论每个主题领域，并在某种程度上，但不是强调微制造以促进微结构科学的发展。这次会议的一个重要特点是将所有被接受的论文存档发表在《真空科学与技术杂志》上；因此，我们可以将这次会议的重要成果传播给更广泛的受众。