Travel to Attend: 32nd International Symposium on Electron,Ion and Photon Beams, Fort Lauderdale, Florida May 31 - June 2, 1988

这笔赠款将促进大学更多地参与 第32届电子束、离子束和光子束国际研讨会 1988年5月31日至6月3日在佛罗里达劳德代尔堡举行。 这是 关于微细加工的杰出会议;这是一个跨学科的 会议的重点是在一种方式，很少有其他会议这样做， 高分辨率光刻、干法蚀刻转移 材料科学，表面化学和创新设备， 维度 还有其他会议，解决每一个 主题领域分开，并在某种程度上，但不与 强调微细加工，以促进科学的发展， 微观结构 区别于此的一个重要特征是 会议是档案出版的所有接受的文件， 真空科学与技术杂志;我们因此可以传播 会议的重要成果向广大观众。

This grant will facilitate increased University participation in the 32nd International Symposium on Electron, Ion and Photon Beams, to be held May 31 -June 3, 1988 in Fort Lauderdale, Florida. This is the outstanding conference on microfabrication; it is a cross-disciplinary conference that focuses in a way that few other conferences do on the complement of high resolution lithography, dry etch transfer, materials science, surface chemistry and innovative devices of reduced dimension. There are other conferences that address each of the subject areas separately, and to some extent, but not with the emphasis on microfabrication for the advancement of the science of microstructures. An important feature that distinguishes this conference is the archival publication of all accepted papers in the Journal of Vacuum Science and Technology; we may thus disseminate the important results of this conference to a wide audience.