OMVPE and Characterization of CdTe Epitaxial Films

CdTe 外延膜的 OMVPE 和表征

• 批准号: 8908547
• 负责人: Paul Sides
• 金额: $ 15.84万
• 依托单位: Carnegie-Mellon University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-09-01 至 1992-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8908547&HistoricalAwards=false
• 关键词: OMVPE; Characterization; CdTe; Epitaxial; Films

This is an interdisciplinary project to study the chemical engineering aspects of organometallic vapor phase epitaxy (OMVPE). It involves an interdisciplinary team of two chemical engineers and two materials scientists. The team has selected a known but important system, the homo- and heteroepitaxial growth of cadmium telluride onto cadmium telluride and gallium arsenide surfaces. There are three aspects of the study: 1. Modeling of the deposited films as a function of temperature, alkyl mixture, and flow in an impinging jet reactor with uniform heat and mass transfer characteristics. 2. Study of the surface chemical kinetics by thermogravimetric analysis to develop surface kinetic constants to feed into the model developed in the first study. 3. Evaluation of the electronic and structural quality of the films as they are formed under different conditions, as identified with the help of the model. The great value of this project is in the combination of well thought-out reactor geometry and materials selections, with adequate tools for materials characterization, together with a well-planned, fundamental approach to understanding and controlling the physics and chemistry of the OMVPE process. Processes of this type will play a central role in the development of future high-tech industries, which richly justifies the investment necessary to understand these processes in as full a manner as possible. This improved understanding will translate into improved quality of products and into greater efficiencies in the industries which employ them.

这是一个跨学科的研究项目， 有机金属气相外延（OMVPE）。 它涉及到一个 由两名化学工程师和两种材料组成的跨学科团队 科学家 该团队选择了一个已知但重要的系统， 碲化镉在镉上同质和异质外延生长 碲化物和砷化镓表面。 有三个方面 本研究：1. 将沉积膜建模为以下函数： 温度、烷基混合物和流动在撞击射流反应器中， 均匀的传热和传质特性。 2.研究 表面化学动力学热重分析法 表面动力学常数输入到模型中开发的第一个 study. 3. 电子和结构质量的评估 膜，因为它们在不同的条件下形成，如与 模型的帮助。 这个项目的巨大价值在于将井 经过深思熟虑的反应器几何形状和材料选择， 用于材料表征的工具，以及精心策划的， 理解和控制物理学的基本方法， OMVPE工艺的化学性质。 这种类型的进程将发挥 在未来高科技产业发展中发挥核心作用， 充分证明了理解这些过程所需的投资是合理的 以尽可能完整的方式。 这一改进将 转化为更高的产品质量， 提高了使用它们的行业的效率。