Self-Assembling Microstructures with Application to Precision Resonant-Structure Micromotors

这项研究的目的是开发和展示表面微结构，允许在微机构中控制部件间的间隙。这些自组装微结构(SAM)通过在衬底平面上移动元件来操作，以消除不需要的间隙并提供受控的预加载力。提出了一种制造工艺，该工艺建立在规定的弯矩内，以在从基板上释放时驱动弯曲。交叉指通过局部电阻加热产生静电作用力，用于部件组装。提出了一种四爪谐振式微电机作为研究载体，用于在微动力系统中演示SAMS概念。

This research aims to develop and demonstrate surface microstructures that allow the control of inter-component clearances in micromechanisms. These self-assembling microstructures (SAMS) operate by moving elements in the plane of the substrate both to eliminate undesirable clearances and to provide controlled pre-load forces. A fabrication process is proposed that builds in prescribed bending moments to actuate flexures upon release from the substrate. Interdigitated fingers are used to generate electrostatic forces for component assembly by local resistive heating. A four-pawl resonant micromotor is proposed as a research vehicle for demonstrating SAMS concepts in a microdynamic system.