Self-Assembling Microstructures with Application to Precision Resonant-Structure Micromotors

这项研究旨在开发和展示表面 允许控制组件间的微结构 微观机制中的间隙。 这些自我组装 微结构（SAMS）通过移动元件进行操作， 基板的平面，以消除不期望的 间隙并提供受控的预加载力。 一 提出了一种制造工艺， 释放时致动挠曲件的弯矩 基板。 指状交叉的手指用来产生 局部静电力 电阻加热 一种四爪谐振微电机， 建议作为演示SAMS的研究工具 微动力系统中的概念。

This research aims to develop and demonstrate surface microstructures that allow the control of inter-component clearances in micromechanisms. These self-assembling microstructures (SAMS) operate by moving elements in the plane of the substrate both to eliminate undesirable clearances and to provide controlled pre-load forces. A fabrication process is proposed that builds in prescribed bending moments to actuate flexures upon release from the substrate. Interdigitated fingers are used to generate electrostatic forces for component assembly by local resistive heating. A four-pawl resonant micromotor is proposed as a research vehicle for demonstrating SAMS concepts in a microdynamic system.