High Force Micro-Actuator Using TiNi Shape Memory Alloy

这是一项二期SBIR研究活动。其目标是确定形状记忆薄膜技术与硅微加工相结合的加工要求。这将通过专注于微型阀门的开发来实现。在第一阶段提出的问题将得到解决，结构将在硅和薄膜执行器上进行测试，阀门设计试验台将被构建，各种阀门配置将被检查，硅基微阀将在一系列尺寸上制造。

This is a Phase II SBIR research activity. Its goal is to define the processing requirements for combining shape-memory film technology with silicon micro-fabrication. This will be done by focusing on development of a microvalve. Questions raised in Phase I will be addressed, structures will be fabricated on silicon and film actuators tested, a valve design test bed will be constructed and a variety of valve configurations examined, and silicon based microvalves will be fabricated over a range of sizes.