High Force Micro-Actuator Using TiNi Shape Memory Alloy

使用 TiNi 形状记忆合金的高力微执行器

• 批准号: 9022440
• 负责人: Alfred Johnson
• 金额: $ 24.93万
• 依托单位: TiNi Alloy Company
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-07-01 至 1993-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9022440&HistoricalAwards=false
• 关键词: Force; Micro; Actuator; Using; TiNi

This is a Phase II SBIR research activity. Its goal is to define the processing requirements for combining shape-memory film technology with silicon micro-fabrication. This will be done by focusing on development of a microvalve. Questions raised in Phase I will be addressed, structures will be fabricated on silicon and film actuators tested, a valve design test bed will be constructed and a variety of valve configurations examined, and silicon based microvalves will be fabricated over a range of sizes.

这是第二阶段 SBIR 研究活动。其目标是确定形状记忆薄膜技术与硅微加工相结合的加工要求。 这将通过专注于微型阀的开发来完成。 第一阶段提出的问题将得到解决，结构将在硅和薄膜执行器上制造并进行测试，阀门设计试验台将被建造并检查各种阀门配置，并且将制造各种尺寸的硅基微型阀门。