High Force Micro-Actuator Using TiNi Shape Memory Alloy

这是第二阶段SBIR研究活动。其 目标是定义处理要求 结合形状记忆膜技术 用硅微制造。 这将是 通过专注于发展一个 微型阀 第一阶段提出的问题将 解决，结构将被制造在 硅和薄膜执行器测试，阀 设计试验台将建成， 检查各种瓣膜配置，以及 硅基微阀将被制造 在不同的尺寸范围内。

This is a Phase II SBIR research activity. Its goal is to define the processing requirements for combining shape-memory film technology with silicon micro-fabrication. This will be done by focusing on development of a microvalve. Questions raised in Phase I will be addressed, structures will be fabricated on silicon and film actuators tested, a valve design test bed will be constructed and a variety of valve configurations examined, and silicon based microvalves will be fabricated over a range of sizes.