High-Force Microactuator Using Nickel-Titanium Shape- Memory Alloy

TiNi合金公司建议开发高强度 使用真空沉积形状记忆的微致动器 合金. 需要改进的微致动器用于微致动器。 实验室正在研究的机械装置 (and将在几年内达到市场成熟） 并且对于现在商业生产中的至少一种装置 （一个硅芯片上的气相色谱仪）。 的潜在 形状记忆合金微致动器的优点 静电器件是几个数量级 力和位移的增加。 TiNi形状记忆合金 合金可承受3- 5%的大应变， 应力大，大于100 mpa。 TiNi形状记忆合金薄膜， 在我们的实验室里展示了一种强有力的 形状恢复，将与硅 微加工的组件。 将合并的 形状记忆合金和硅的技术将产生 在一种用于微机械的新型工程材料中， 应用. 研究目标包括： 改进的真空溅射技术以提高产量 TiNi薄膜的物理特性; 通过掩模和选择性蚀刻进行平面制造;以及 开发阀门等功能部件， 泵致动器

TiNi Alloy Company proposes to develop high-force micro-actuators using vacuum deposited shape-memory alloys. Improved micro-actuators are needed for micro- mechanical devices now being researched in laboratories (and which will reach market maturity in a few years) and for at least one device now in commercial production (a gas chromatograph on a silicon chip). The potential advantage of shape-memory alloy microactuators over electrostatic devices is several orders of magnitude increase in force and displacement. TiNi shape-memory alloy tolerates large strain, 3-5 percent, and produces large stress, greater than 100 mpa. Thin films of TiNi shape-memory alloy, which have been demonstrated in our laboratory to exhibit a forceful shape recovery, will be incorporated with silicon components by micro-fabrication. The combined technologies of shape-memory alloy and silicon will result in a new engineering material for micro-mechanical applications. The research objectives to be addressed include: improved vacuum sputtering techniques to improve yield and quality of film; physical characterization of TiNi film; planar fabrication by masking and selective etching; and development of functional components such as valve and pump actuators.