High-Force Microactuator Using Nickel-Titanium Shape- Memory Alloy

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TiNi Alloy Company proposes to develop high-force micro-actuators using vacuum deposited shape-memory alloys. Improved micro-actuators are needed for micro- mechanical devices now being researched in laboratories (and which will reach market maturity in a few years) and for at least one device now in commercial production (a gas chromatograph on a silicon chip). The potential advantage of shape-memory alloy microactuators over electrostatic devices is several orders of magnitude increase in force and displacement. TiNi shape-memory alloy tolerates large strain, 3-5 percent, and produces large stress, greater than 100 mpa. Thin films of TiNi shape-memory alloy, which have been demonstrated in our laboratory to exhibit a forceful shape recovery, will be incorporated with silicon components by micro-fabrication. The combined technologies of shape-memory alloy and silicon will result in a new engineering material for micro-mechanical applications. The research objectives to be addressed include: improved vacuum sputtering techniques to improve yield and quality of film; physical characterization of TiNi film; planar fabrication by masking and selective etching; and development of functional components such as valve and pump actuators.