A System for Micro-Mechanical Spring Design

这项研究的具体技术目标是：o评估目前对材料特性(主要是硅、块体和薄膜)的了解，以此作为良好弹簧设计的基础。这些性能不仅包括拉伸和剪切模数，还包括屈服强度、断裂和疲劳性能。确定一套通常需要的弹簧配置(悬臂、螺旋、桥梁等)。分析(利用微观有限元分析)弹簧配置的顺应性、抗制造误差和公差、抗应力集中、疲劳、等，以分析其微动态响应、共振频率等，从中提炼出一套设计标准弹簧的规则。规则集将取决于：材料；所需的刚度(或固有频率)；所需的空间和方位；首选的技术，以及其他方面。O将规则集整合到计算机辅助微机械弹簧/振荡器设计系统中。

Specific technical objectives of this research are to: o Evaluate the current understanding of material properties (primarily for silicon, bulk and thin films), as a basis for good spring design. These properties will not only include the tensile and shear moduli, but also the yield strength, fracture, and fatigue properties. o Determine a set of commonly required spring configurations (cantilevers, spirals, bridges, etc). o Analyze (utilizing micro-finite element analysis) spring configurations for their compliance, resistance to manufacturing errors and tolerances, resistance to stress concentrations, fatigue, etc. o Analyze spring configurations for their micro- dynamic responses, resonant frequencies, etc. o From the above, extract a set of rules for designing standard springs. The rule-set will depend upon: material; stiffness (or natural frequency) required; space and orientation required; preferred technology, and other aspects. o Integrate the rule-set into a computer-aided micro-mechanical spring/oscillator design system.