A System for Micro-Mechanical Spring Design

本研究的具体技术目标是：评估目前对材料特性（主要是硅、体和薄膜）的理解，作为良好弹簧设计的基础。这些性能不仅包括拉伸和剪切模量，还包括屈服强度、断裂和疲劳性能。o确定一组常用的弹簧配置（悬臂、螺旋、桥式等）。o分析（利用微有限元分析）弹簧配置的顺应性，对制造误差和公差的抵抗力，对应力集中，疲劳的抵抗力对弹簧的微动力响应、谐振频率等进行分析。从中得出一套标准弹簧的设计原则。规则集将取决于：材料；要求刚度（或固有频率）；所需的空间和方向；首选技术等方面。o将规则集整合到计算机辅助微机械弹簧/振荡器设计系统中。

Specific technical objectives of this research are to: o Evaluate the current understanding of material properties (primarily for silicon, bulk and thin films), as a basis for good spring design. These properties will not only include the tensile and shear moduli, but also the yield strength, fracture, and fatigue properties. o Determine a set of commonly required spring configurations (cantilevers, spirals, bridges, etc). o Analyze (utilizing micro-finite element analysis) spring configurations for their compliance, resistance to manufacturing errors and tolerances, resistance to stress concentrations, fatigue, etc. o Analyze spring configurations for their micro- dynamic responses, resonant frequencies, etc. o From the above, extract a set of rules for designing standard springs. The rule-set will depend upon: material; stiffness (or natural frequency) required; space and orientation required; preferred technology, and other aspects. o Integrate the rule-set into a computer-aided micro-mechanical spring/oscillator design system.