A System for Micro-Mechanical Spring Design

本研究的具体技术目标是： o评估当前对材料的理解 性能（主要针对硅、块状和薄型 电影），作为良好的弹簧设计的基础。 这些 性能不仅包括拉伸性能， 剪切模量，还有屈服强度，断裂， 和疲劳性能。 o确定一组常用弹簧 配置（杠杆、螺旋、桥等）。 o分析（利用微观有限元分析） 弹簧结构的顺应性， 对制造误差和公差的抵抗力， 抗应力集中、抗疲劳等。 o分析弹簧配置的微观 动态响应、谐振频率等。 从上面，提取一组规则， 设计标准弹簧。 规则集将 取决于：材料;硬度（或自然硬度） 频率）;空间和方向 需要;首选技术和其他方面。 o将规则集整合到计算机辅助 微机械弹簧/振荡器设计系统。

Specific technical objectives of this research are to: o Evaluate the current understanding of material properties (primarily for silicon, bulk and thin films), as a basis for good spring design. These properties will not only include the tensile and shear moduli, but also the yield strength, fracture, and fatigue properties. o Determine a set of commonly required spring configurations (cantilevers, spirals, bridges, etc). o Analyze (utilizing micro-finite element analysis) spring configurations for their compliance, resistance to manufacturing errors and tolerances, resistance to stress concentrations, fatigue, etc. o Analyze spring configurations for their micro- dynamic responses, resonant frequencies, etc. o From the above, extract a set of rules for designing standard springs. The rule-set will depend upon: material; stiffness (or natural frequency) required; space and orientation required; preferred technology, and other aspects. o Integrate the rule-set into a computer-aided micro-mechanical spring/oscillator design system.