Structured Design Methods for MEMS

MEMS 的结构化设计方法

• 批准号: 9529675
• 负责人: Erik Antonsson
• 金额: $ 32.29万
• 依托单位: California Institute of Technology
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-04-15 至 2000-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9529675&HistoricalAwards=false
• 关键词: Structured; Design; Methods; MEMS

This research is on developing structured design methods for Micro-Electrical- Mechanical Systems (MEMS). The focus is on MEMS fabrication process simulation and mask-layout synthesis. In analogy to present-day VLSI design, tools to permit rapid, accurate, conservative mask layout synthesis of MEMS are being explored. The objective for the tools is to enable a MEMS designer to specify a desire micro-mechanical function (e.g., a mechanical spring with particular characteristics), and have a system automatically generate the information (mask- layout, and other fabrication instructions) to create the shape that exhibits the desired function. This would includes refining and extending the 3-D anisotropic etch simulation methods. Prototype software design tools are being developed.

本研究旨在发展微电子机械系统(MEMS)的结构化设计方法。重点是MEMS制造工艺模拟和掩模版图综合。类似于目前的VLSI设计，人们正在探索能够快速、准确、保守地合成MEMS掩模布局的工具。该工具的目的是使MEMS设计者能够指定所需的微机械功能(例如，具有特定特性的机械弹簧)，并使系统自动生成信息(掩模布局和其他制造指令)以创建展现所需功能的形状。这将包括改进和扩展三维各向异性腐蚀模拟方法。正在开发原型软件设计工具。