Dynamics of micro-electro-mechanical system resonators

微机电系统谐振器的动力学

• 批准号: 341837-2008
• 负责人: AbdelRahman, Eihab
• 金额: $ 1.31万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2010
• 资助国家: 加拿大
• 起止时间: 2010-01-01 至 2011-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=458604
• 关键词: Dynamics; micro; electro; mechanical; system

A micro electro mechanical system (MEMS) resonator is a vibrating micro-structure embedded in a circuit. These devices are the basic components of a new generation of inexpensive and highly accurate circuit clocks, radio frequency (RF) filters, gas sensors, and gyroscopes. However, establishing a reliable design process for MEMS resonators has been an elusive goal. The main hurdle is that their dynamics are not well understood because of (i) the nonlinear nature of the actuating forces, (ii) the proportionally large motions involved, and (iii) and the multi-field coupling between the structural, electrostatic, electromagnetic, and fluidic forces.

微机电系统（MEMS）谐振器是嵌入电路中的振动微结构。这些器件是新一代廉价且高精度的电路时钟、射频（RF）滤波器、气体传感器和陀螺仪的基本组件。然而，为MEMS谐振器建立可靠的设计过程一直是一个难以实现的目标。主要的障碍是，它们的动力学没有得到很好的理解，因为（i）的驱动力的非线性性质，（ii）所涉及的成比例的大运动，和（iii）和结构，静电，电磁和流体力之间的多场耦合。