Tera-Hertz Metal-Semiconductor-Metal Photodetectors

太赫兹金属-半导体-金属光电探测器

• 批准号: 9120527
• 负责人: Stephen Chou
• 金额: $ 4.98万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-09-01 至 1993-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9120527&HistoricalAwards=false
• 关键词: Tera; Hertz; Metal; Semiconductor; Photodetectors

The goal of this research is, based on our initial success, to continue investigating and developing ultra-high speed metal-semiconductor-metal (MSM) photodetectors that have a sub-100nm finger spacing and finger width, operate with a sub- picosecond response time and a tera-hertz cut-off frequency, and can detect a broad range of wavelengths from visible to infrared. The proposed research will focus on the following four aspects: (1) Fabricate tera-hertz MSM photodetectors with sub-100nm finger spacing and finger width using ulta-high resolution electron beam lithography, initially on GaAs, and later InGaAs,InGaP,SOI (Si on insulator), and Si-Ge for different response wavelengths. (2) Investigate experimentally and theoretically the factors that can increase the detectors' speed and sensitivity. (3) Investigate the dynamic performance of the MSM photodetectors using femto-second pulsed lasers. And (4) use the ulta-high speed MSM detectors as a vehicle to study ballistic transport of electrons and holes between a sub-100nm finger spacing and in a high electric field, particularly carrier velocity overshoots, and explore their application on improvement of detectors' speed.

这项研究的目标是，根据我们最初的 成功，继续研究和开发 超高速金属-半导体-金属 具有亚100纳米指状物的光电探测器 间距和手指宽度，与子操作， 皮秒响应时间和太赫兹截止 频率，并可以检测到广泛的 波长从可见光到红外线。 拟议 研究将集中在以下四个方面： (1)制作具有以下特性的太赫兹MSM光电探测器 亚100 nm指间距和指宽度， 超高分辨率电子束光刻， 最初在GaAs上，后来在InGaAs、InGaP、SOI（Si 绝缘体上）和Si-Ge的不同响应 波长 (2)实验研究和 从理论上讲， 探测器的速度和灵敏度。 (3)探讨 MSM光电探测器的动态性能 使用飞秒脉冲激光。 （4）使用 超高速MSM检测器作为载体进行研究 电子和空穴的弹道传输， 亚100纳米的指间距和高电 场，特别是载波速度过冲，以及 探索它们在改善 探测器的速度