REU Site for Microelectronic Materials and Processing

REU 微电子材料和加工网站

• 批准号: 9200056
• 负责人: Christos Takoudis
• 金额: $ 5万
• 依托单位: Purdue Research Foundation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-05-01 至 1993-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9200056&HistoricalAwards=false
• 关键词: REU; Site; Microelectronic; Materials; Processing

The Purdue Schools of Chemical, Electrical, and Materials Engineering, which have been sharing undergraduate courses as well as research on electronic materials and processing for several years will participate in a REU site in microelectronic materials and processing. The focus of the REU site is the synthesis, processing, properties, structure, and performance of microelectronic materials, and the interrelationships among these aspects. Specific projects include anisotropic etching of microelectronic thin films, selective epitaxial growth and three- dimensional integration, processing on patterned substrates of electronic materials, fundamentals of metal contacts to semiconductors, and 'a priori' predictions of physical and chemical properties of microelectronic materials as functions of their synthesis and processing. The goals of the REU will be to introduce students to independent research on these materials and device fabrication, to develop and enhance the students' creativity and originality, to develop outstanding candidates for graduate programs, to demonstrate the excitement and rewards from successful research, and to prepare B.S. graduates who will excel in industrial research and development environments.

普渡大学化学、电气和材料学院 工程学，也一直在分享本科课程， 作为电子材料和加工的研究， 年将参加一个REU网站在微电子材料 和处理 REU网站的重点是合成， 加工、性能、结构和性能 微电子材料，以及它们之间的相互关系 方面 具体项目包括各向异性蚀刻 微电子薄膜，选择性外延生长和三- 尺寸集成，在图案化衬底上的处理， 电子材料，金属接触基础， 半导体，以及物理和化学的“先验”预测 微电子材料的性能作为其 合成和加工。 REU的目标是 向学生介绍对这些材料的独立研究， 器件制作，培养和提高学生的创造力 和独创性，培养优秀的研究生候选人 计划，以展示成功的兴奋和奖励 研究，并准备学士学位毕业生将在 工业研究和开发环境。