REU Site for Microelectronic Materials and Processing

REU 微电子材料和加工网站

• 批准号: 9300405
• 负责人: Christos Takoudis
• 金额: $ 15万
• 依托单位: Purdue Research Foundation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-05-15 至 1997-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9300405&HistoricalAwards=false
• 关键词: REU; Site; Microelectronic; Materials; Processing

Twelve students will participate in the Research Experiences for Undergraduates program in microelectronic materials and processing at Purdue. The Schools of Chemical, Electrical, and Materials Engineering, which have been sharing undergraduate courses as well as research on electronic materials and processing for several years, participate in this program. Students will be recruited from regional universities and universities with high minority enrollments for summer research projects. Undergraduate students from Purdue will be able to perform summer or academic year research. The focus of the REU site will be the synthesis, processing, properties, structure, and performance of microelectronic materials, and the interrelationships among these aspects. Specific projects include anisotropic etching of microelectronic this films, selective epitaxial growth and insulator degradation, processing on patterned substrates, fundamentals of metal contacts to semiconductors, and integration of oxide films with Si technologies. The goals of the REU are to introduce students - with emphasis on women and minorities - to independent research on electronic materials and their processing, to develop and enhance the student's creativity and originality, to develop outstanding candidates for graduate programs, to demonstrate the excitement and rewards from successful research, and to prepare B.S. graduates who will excel in industrial Research and Development environments.

12名学生将参加普渡大学微电子材料与工艺本科生研究体验项目。多年来，化学、电气和材料工程学院一直在分享本科课程以及电子材料和加工方面的研究，它们参与了这一计划。暑期研究项目将从地区性大学和少数民族入学率较高的大学招生。普渡大学的本科生将能够进行暑期或学年的研究。REU会议的重点将是微电子材料的合成、加工、性能、结构和性能，以及这些方面之间的相互关系。具体项目包括微电子薄膜的各向异性刻蚀、选择性外延生长和绝缘体退化、图案化衬底上的加工、金属与半导体接触的基本原理以及氧化膜与硅技术的集成。REU的目标是向学生--重点是妇女和少数族裔--介绍电子材料及其加工的独立研究，发展和提高学生的创造力和原创性，培养优秀的研究生课程候选人，展示成功研究的兴奋和回报，并培养在工业研发环境中出类拔萃的理工科毕业生。