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Conference: Support of the 36th International Symposium on Electron, Ion and Photon Beams to be held in Orlando, FL on May 26-29, 1992.

Conference: Support of the 36th International Symposium on Electron, Ion and Photon Beams to be held in Orlando, FL on May 26-29, 1992.
会议:支持将于 1992 年 5 月 26 日至 29 日在佛罗里达州奥兰多举行的第 36 届电子、离子和光子束国际研讨会。
批准号:
9204871
负责人:
Henry Smith
金额:
$0.5万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1992
资助国家:
美国
项目状态:
已结题
起止时间:
1992-05-15 至 1993-04-30

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中文摘要
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英文摘要
This grant is for support of the 36th International Symposium on Electron, Ion and Photon Beams, Orlando, FL, May 26-29, 1992. This long-standing annual symposium is considered the premier conference for the fields of nano- and micro- fabrication, x-ray, electron and ion lithoqraphies and particle beam optics. This request and previous years support by NSF has been intended to enable graduate students who are working in these fields to attend the meeting and present their work. Because this is an important enabling technology for the microelectronics and other high-tech industries, and the requested use of NSF funds for graduate student support will be very effective in enhancing the base of trained researchers in these fields.
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会议论文
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