REG: Industrial Applications of Plasma Science

根据本工程研究 设备补助金，电气 工程部 美国加州大学洛杉矶分校 洛杉矶，将购买真空， 电子和诊断设备 将致力于支持 工程研究。 的 设备将用于 实验室致力于工业 低温应用 等离子体物理学 惠民工程 这笔赠款将包括a） 大面积等离子体的发展 半导体蚀刻机 芯片和液晶显示器; B）致密等离子体的发展 新粒子的列 加速器增加相干光 来源; c）调查 灰尘和微粒的行为 工业和天体物理 等离子体;以及d）壁的研究 聚变等离子体材料 反应堆

Under this Engineering Research Equipment Grant, the Electrical Engineering Department of the University of California, Los Angeles, will purchase vacuum, electronic, and diagnostic equipment which will be dedicated to support research in engineering. The equipment will be used in a laboratory devoted to industrial applications of low Temperature Plasma Physics. Projects benefiting from this grant will include a) development of large-area plasma etching machines for semiconductor chips and liquid crystal displays; b) development of dense plasma columns for new particle accelerators add coherent light sources; c) investigations on the behavior of dust and particulates in industrial and astrophysical plasmas; and d) studies of wall materials used in fusion plasma reactors.