Upgrade an Existing 4-Target Sputtering System

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The MINT Center at the University of Alabama will purchase equipment to upgrade an existing Vac-Tec four target sputtering system. Specifically the proposal requests funds for retro-fitting a computer based control system and the installation of a dedicated residual gas analyzer. The equipment will be used to accelerate progress on several research projects, including an investigation of the physical, magnetic and magnetoresistive properties of giant magnetoresistance multilayers for use in MR heads, and of the properties of sputtered FeN based materials for both thin film recording heads and media. Both of these projects currently receive significant NSF funding in the form of individual investigator grants. A continuing commitment to these education and training of graduate students is evidenced by 13 students supported on related projects. The performance increases, which may be possible using these materials, especially in atomically engineered multilayer configurations, make them very attractive candidates for exploitation in the data recording industry. The routine production of multilayers composed of a large number of identical bilayers and of reactively sputtered FeN films and multilayers requires a high degree of process control. This control will be provided by the proposed upgrade greatly enhancing the ongoing research program.