SGER: Manufacturing Massively Parallel Microelectro- mechanical Arrays for Macroscopic Actuation

SGER：制造用于宏观驱动的大规模并行微机电阵列

• 批准号: 9317937
• 负责人: Thomas Bifano
• 金额: $ 2.5万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-08-15 至 1994-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9317937&HistoricalAwards=false
• 关键词: SGER; Manufacturing; Massively; Parallel; Microelectro

9317937 Bifano The award is for investigating issues in the manufacture of massively parallel, microelectromechanical systems by using semiconductor fabrication technology. Arrays of electrostatically actuated diaphragms have been manufactured by such a process, and will be evaluated for actuator mechanical characteristics and process yield. The production of optical quality surfaces on such multi actuator wafers by precision diamond grinding will also be investigated, as the initial application to be investigated is adaptive optical compensation of telescopes. Successful completion of the research would enable precise, fine, distributed actuation which would benefit a variety of applications. Examples of such applications are a multi zone deformable mirror to be used for adaptive optical compensation of telescopes, and multi gate flow control valve for precise control of very low liquid flow rates in semiconductor, biomedical and chemical applications.

小行星9317937 该奖项旨在研究利用半导体制造技术制造大规模并行微机电系统的问题。 静电致动隔膜的阵列已经通过这样的工艺制造，并且将针对致动器机械特性和工艺良率进行评估。 还将研究通过精密金刚石研磨在这种多致动器晶片上生产光学质量表面，因为要研究的初始应用是望远镜的自适应光学补偿。 研究的成功完成将使精确，精细，分布式驱动，这将有利于各种应用。 这种应用的例子是用于望远镜的自适应光学补偿的多区域可变形反射镜，以及用于在半导体、生物医学和化学应用中精确控制非常低的液体流速的多门流量控制阀。