SGER: Manufacturing Massively Parallel Microelectro- mechanical Arrays for Macroscopic Actuation

SGER：制造用于宏观驱动的大规模并行微机电阵列

• 批准号: 9317937
• 负责人: Thomas Bifano
• 金额: $ 2.5万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-08-15 至 1994-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9317937&HistoricalAwards=false
• 关键词: SGER; Manufacturing; Massively; Parallel; Microelectro

9317937 Bifano The award is for investigating issues in the manufacture of massively parallel, microelectromechanical systems by using semiconductor fabrication technology. Arrays of electrostatically actuated diaphragms have been manufactured by such a process, and will be evaluated for actuator mechanical characteristics and process yield. The production of optical quality surfaces on such multi actuator wafers by precision diamond grinding will also be investigated, as the initial application to be investigated is adaptive optical compensation of telescopes. Successful completion of the research would enable precise, fine, distributed actuation which would benefit a variety of applications. Examples of such applications are a multi zone deformable mirror to be used for adaptive optical compensation of telescopes, and multi gate flow control valve for precise control of very low liquid flow rates in semiconductor, biomedical and chemical applications.

9317937 Bifano该奖项是为了调查通过使用半导体制造技术制造大规模平行的微电动系统的问题。 通过这种过程制造了静电驱动的膜片的阵列，并将评估执行器的机械特性和过程产量。 还将研究通过精密钻石研磨在此类多执行晶片上的光学质量表面的产生，因为要研究的最初应用是望远镜的自适应光学补偿。 成功完成研究将实现精确，精细的分布式驱动，这将受益于各种应用程序。 此类应用的示例是一种多区域可变形镜，用于望远镜的自适应光学补偿和多门流控制阀，以精确控制半导体，生物医学和化学应用中非常低的液体流量。